Journal
PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS
Volume 254, Issue 2, Pages -Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/pssb.201600088
Keywords
electrochemical properties; inorganic solid electrolyte; lithium microbattery; LiSiPON
Categories
Funding
- LOEWE program of excellence of the Federal State of Hessen (project initiative STORE-E)
- German Federal Ministry of Education and Research (BMBF) within the funding program Photonics Research Germany [13N13239]
Ask authors/readers for more resources
Lithium silicon phosphorus oxynitride (LiSiPON) thin films with different compositions have been prepared by RF magnetron sputtering in N-2 by using three targets xLi(2)SiO(3)(1-x) Li3PO4 with x=0.1, 0.3, and 0.5. Compared with LiPON, the electrical properties of LiSiPON have been improved by introducing silicon. LiSiPON films deposited from the target 0.5Li(2)SiO(3)0.5Li(3)PO(4) yield the highest ionic conductivity of up to 9.7x10(-6)Scm(-1) with an activation energy of only 0.41eV. The main mechanism for increasing ionic conductivity is the enhancement of carrier mobility. By DC polarization measurements the electronic partial conductivity was found at least seven orders of magnitude smaller than the ionic conductivity. Linear voltammetry results showed that the LiSiPON films are electrochemically stable in contact with stainless steel in the voltage range of 0-6V. The substitution of silicon for phosphorus in the film evidenced from X-ray photoelectron spectroscopy analysis indicated silicon in the film will create more abundant cross-linking structures Si-O-P and (P, Si)-N<(P, Si), hence created more Li+ conducting paths which favored the higher mobility of lithium ions and larger ionic conductivity. The optical bandgap was found to decrease with increasing silicon content. We demonstrate that the prepared LiSiPON films with their larger ionic conductivity and low electronic conductivity may serve as an alternative to LiPON for applications in high energy density and high voltage lithium batteries.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available