Journal
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
Volume 213, Issue 9, Pages 2317-2328Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/pssa.201532891
Keywords
annealing; hydrogenation; thin films; transparent conductive oxides; ZnO
Funding
- Fundacao para a Ciencia e a Tecnologia (FCT) [EXCL/CTM-NAN/0201/2012, UID/CTM/50025/2013, PTDC/CTM-ENE/2514/2012]
- European project CEOPS [309984]
- European project i-Flexis [611070]
- European project All-Oxide-Photovoltaics (FP7-FET grant) [309018]
- FCT
- MIT-Portugal [SFRH/BD/33978/2009]
- EU Marie Curie Action FP7-PEOPLE-IEF through the DIELECTRIC PV project [629370]
- Fundação para a Ciência e a Tecnologia [PTDC/CTM-ENE/2514/2012] Funding Source: FCT
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The post-deposition modification of ZnO-based transparent conductive oxides (TCOs) can be the key to produce thin films with optoelectronic properties similar to indium tin oxide (ITO), but at a much lower cost. Here, we present electro-optical results achieved for post-deposition annealing of Al-Zn-O (AZO), AZO:H, Ga-Zn-O:H (GZO:H), and Zn-O:H (ZNO:H) thin films deposited by RF sputtering at room temperature. These studies comprise results of thermal annealing at atmospheric pressure, vacuum, forming gas, H-2 and Ar atmospheres, and H-2 and Ar plasmas, which lead to significant enhancement of their electro-optical properties, which are correlated to morphological and structural improvements. The post-deposition annealing leads to an enhancement in resistivity above 40% for AZO, AZO:H, and GZO:H, reaching rho approximate to 2.6-3.5 x 10(-4) Omega cm, while ZnO:H showed a lower improvement of 13%. The averaged optical transmittance in the visible region is about 89% for the investigated TCOs. Such results match the properties of state-of-art ITO (rho approximate to 10(-4) Omega cm and transmittance in VIS range of 90%) employing much more earth-abundant materials. (C) 2016 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
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