Journal
OPTICS AND LASERS IN ENGINEERING
Volume 77, Issue -, Pages 1-7Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.optlaseng.2015.07.006
Keywords
Beam delivery optics; Diffractive beam splitters; Beam array; Laser materials processing; High-power lasers
Categories
Ask authors/readers for more resources
We report a beam-delivery system consisting of a non-digitized diffractive beam splitter and a Fourier transform lens. The system is applied to the deep-drilling of silicon using a nanosecond pulse laser in the manufacture of inkjet printer heads. In this process, a circularly polarized pulse beam is divided into an array of uniform beams, which are then delivered precisely to the process points. To meet these requirements, the splitter was designed to be polarization-independent with an efficiency >95%. The optical elements were assembled so as to allow the fine tuning of the effective overall focal length by adjusting the wavefront curvature of the beam. Using the system, a beam alignment accuracy of <5 mu m was achieved for a 12-mm-wide beam array and the throughput was substantially improved (10,000 points on a silicon wafer drilled in similar to 1 min). This beam-delivery scheme works for a variety of laser applications that require parallel processing. (c) 2015 Elsevier Ltd. All rights reserved.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available