A Flexible Microstructured Pressure Sensor With High Performance Based on Vertically Aligned Carbon Nanotubes and Ion Gel

Herein, we present a novel microstructured capacitive pressure sensor, integrating photolithography techniques and advanced materials, such as vertically aligned multiwall carbon nanotubes (VA-MWCNTs) and ion gel. The introduction of micropyramidal electrodes and microhemispheric electrolyte with poly(vinyl alcohol)/phosphoric acid (H3PO4) ion gel demonstrates a significant improvement in sensitivity (124.9 kPa(-1)) and response time (125 ms). Furthermore, the application of VA-MWCNTs coated with parylene-C improves the electrode's durability and confers remarkable repeatability on the entire system under various pressure conditions. This superior performance in both static and dynamic measurements positions the sensor as a promising candidate for health monitoring applications.

Automated summary

In this study, a novel microstructured capacitive pressure sensor is proposed, which combines photolithography techniques with advanced materials including vertically aligned multiwall carbon nanotubes (VA-MWCNTs) and ion gel. The introduction of micropyramidal electrodes and microhemispheric electrolyte with poly(vinyl alcohol)/phosphoric acid (H3PO4) ion gel greatly improves sensitivity (124.9 kPa(-1)) and response time (125 ms). Moreover, the use of VA-MWCNTs coated with parylene-C enhances the electrode's durability and ensures remarkable repeatability of the entire system under various pressure conditions. The excellent performance in both static and dynamic measurements positions this sensor as a promising candidate for health monitoring applications.