Journal
ISCIENCE
Volume 26, Issue 10, Pages -Publisher
CELL PRESS
DOI: 10.1016/j.isci.2023.107788
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This work reports on the influence of design parameters on the optical efficiency of metasurface-based color splitters, as well as the possibility of fabricating them in legacy fabrication facilities with low structure resolutions.
Metasurface-based color splitters are emerging as next-generation optical components for image sensors, replacing classical color filters and microlens arrays. In this work, we report how the design parameters such as the device dimensions and refractive indices of the dielectrics affect the optical efficiency of the color splitters. Also, we report how the design grid resolution parameters affect the optical efficiency and discover that the fabrication of a color splitter is possible even in legacy fabrication facilities with low structure resolutions.
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