The Real-Time Monitoring of the Laser-Induced Functionalization of Transparent Conductive Oxide Films

Laser-induced functionalization using excimer laser irradiation has been widely applied to transparent conductive oxide films. However, exploring suitable irradiation conditions is time-consuming and cost-ineffective as there are numerous routine film fabrication and analytical processes. Thus, we herein explored a real-time monitoring technique of the laser-induced functionalization of transparent conductive oxide films. We developed two types of monitoring apparatus, electrical and optical, and applied them to magnetron-sputtered, Sn-doped In2O3 films grown on glass substrates and hydrogen-doped In2O3 films on glass or plastic substrates using a picosecond Nd:YAG pulsed laser. Both techniques could monitor the functionalization from a change in the properties of the films on glass substrates via laser irradiation, but electrical measurement was unsuitable for the plastic samples because of a laser-induced degradation of the underlying plastic substrate, which harmed proper electrical contact. Instead, we proposed that the optical properties in the near-infrared region are more suitable for monitoring. The changes in the optical properties were successfully detected visually in real-time by using an InGaAs near-infrared camera.

Automated summary

This article explores a real-time monitoring technique for laser-induced functionalization of transparent conductive oxide films. Two types of monitoring apparatus, electrical and optical, were developed and applied to different types of films. The study suggests that monitoring the changes in optical properties in the near-infrared region is more suitable.