Journal
NANOTECHNOLOGY
Volume 27, Issue 43, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/27/43/434002
Keywords
black phosphorus; phosphorene; XPS; ALD; FET; passivation
Funding
- US National Science Foundation [ECCS-1449270]
- AFOSR/NSF EFRI 2DARE Program
- Army Research Office [W911NF-14-1-0572]
- SRC GRC Program
- Birck Nanotechnology Center
- China Scholarship Council
- Emerging Frontiers & Multidisciplinary Activities
- Directorate For Engineering [1433459] Funding Source: National Science Foundation
Ask authors/readers for more resources
Black phosphorus (BP), the bulk counterpart of monolayer phosphorene, is a relatively stable phosphorus allotrope at room temperature. However, monolayer phosphorene and ultra-thin BP layers degrade in ambient atmosphere. In this paper, we report the investigation of BP oxidation and discuss the reaction mechanism based on the x-ray photoelectron spectroscopy (XPS) data. The kinetics of BP oxidation was examined under various well-controlled conditions, namely in 5% O-2/Ar, 2.3% H2O/Ar, and 5% O-2 and 2.3% H2O/Ar. At room temperature, the BP surface is demonstrated not to be oxidized at a high oxidation rate in 5% O2/Ar nor in 2.3% H2O/Ar, according to XPS, with the thickness of the oxidized phosphorus layer <5 angstrom for 5 h. On the other hand, in the O-2/H2O mixture, a 30 angstrom thickness oxide layer was detected already after 2 h of the treatment. This result points to a synergetic effect of water and oxygen in the BP oxidation. The oxidation effect was also studied in applications to the electrical measurements of BP field-effect transistors (FETs) with or without passivation. The electrical performance of BP FETs with atomic layer deposition (ALD) dielectric passivation or h-BN passivation formed in a glove-box environment are also presented.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available