Argon and Oxygen Gas Flow Rate Dependency of Sputtering-Based Indium-Gallium-Zinc Oxide Thin-Film Transistors

Oxygen vacancies are a major factor that controls the electrical characteristics of the amorphous indium-gallium-zinc oxide transistor (a-IGZO TFT). Oxygen vacancies are affected by the composition ratio of the a-IGZO target and the injected oxygen flow rate. In this study, we fabricated three types of a-IGZO TFTs with different oxygen flow rates and then investigated changes in electrical characteristics. Atomic force microscopy (AFM) was performed to analyze the surface morphology of the a-IGZO films according to the oxygen gas rate. Furthermore, X-ray photoelectron spectroscopy (XPS) analysis was performed to confirm changes in oxygen vacancies of a-IGZO films. The optimized a-IGZO TFT has enhanced electrical characteristics such as carrier mobility (& mu;) of 12.3 cm(2)/V & BULL;s, on/off ratio of 1.25 x 10(10) A/A, subthreshold swing (S.S.) of 3.7 V/dec, and turn-on voltage (V-to) of -3 V. As a result, the optimized a-IGZO TFT has improved electrical characteristics with oxygen vacancies having the highest conductivity.

Automated summary

Oxygen vacancies play a crucial role in determining the electrical characteristics of the a-IGZO TFT. The composition ratio of the a-IGZO target and oxygen flow rate affect the presence of oxygen vacancies. This study investigated the impact of different oxygen flow rates on the electrical characteristics of a-IGZO TFTs and found that the optimized TFT exhibited improved conductivity due to the presence of oxygen vacancies.