Investigation of the Electrical Coupling Effect for Monolithic 3-Dimensional Nonvolatile Memory Consisting of a Feedback Field-Effect Transistor Using TCAD

In this study, the electrical characteristics and electrical coupling effect for monolithic 3-dimensional nonvolatile memory consisting of a feedback field-effect transistor (M3D-NVM-FBFET) were investigated using technology computer-aided design. The M3D-NVM-FBFET consists of an N-type FBFET with an oxide-nitride-oxide layer and a metal-oxide-semiconductor FET (MOSFET) in the top and bottom tiers, respectively. For the memory simulation, the programming and erasing voltages were applied at 18 and -18 V for 1 mu s, respectively. The memory window of the M3D-NVM-FBFET was 1.98 V. As the retention simulation was conducted for 10 years, the memory window decreased from 1.98 to 0.83 V. For the M3D-NVM-FBFET, the electrical coupling that occurs through an electrical signal in the bottom-tier transistor was investigated. As the thickness of the interlayer dielectric (TILD) decreases from 100 to 10 nm, the change in the VTH increases from 0.16 to 0.87 V and from 0.15 to 0.84 V after the programming and erasing operations, respectively. M3D-NVM-FBFET circuits with a thin TILD of 50 nm or less need to be designed considering electrical coupling.

Automated summary

This study investigates the electrical characteristics and electrical coupling effect of a monolithic 3-dimensional nonvolatile memory. The results show that the memory window and retention time are affected by the thickness of the interlayer dielectric (TILD), and it is necessary to consider the electrical coupling effect when designing circuits with thin TILD.