Journal
NANO LETTERS
Volume 16, Issue 9, Pages 5785-5791Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acs.nanolett.6b02523
Keywords
Epitaxial PMN-PT films; quantum dots; MEMS; single photon sources
Categories
Funding
- Alexander von Humboldt Foundation
- European Union [601126 210]
- German Research Foundation (DFG) [DI 2013/2-1]
- German Federal Ministry of Education and Research (BMBF) [16KIS0106]
- IFW Excellence Program
- DFG in the framework of the priority program SPP 1599 [HU 1726/3]
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Elastic strain fields-based on single crystal piezoelectric elements represent an effectivity way for engineering the quantum,dot (QD) emission with unrivaled precision and technological relevance: However, pioneering researches in this direction were mainly based, on bulk piezoelectric substrates, which prevent the development of clip-scale devices. Here, we present a monolithically integrated Microelectromechanical systems (MEMS) device with great potential for on-chip quantum photonic applications. High-quality epitatal PMN-PT thin fillip have been. grown on SrTiO3 buffered Si and show excellent piezoelectric responses: Dense arrays of MEMS with small footprints are then fabricated based On these films, forming an on-chip strain tuning platform. After transferring, the QD-containing nanomembranes onto these MEMS, the nonclassical emissions (e.g., single photons) from single QDs can be engineered by:the strain fields. We envision that the strain tunable QD sources on the individually addressable and monolithically integrated MEMS pave the way toward complex quantum photonic applications on chip.
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