Monolithically Integrated Microelectromechanical Systems for On-Chip Strain Engineering of Quantum Dots

Elastic strain fields-based on single crystal piezoelectric elements represent an effectivity way for engineering the quantum,dot (QD) emission with unrivaled precision and technological relevance: However, pioneering researches in this direction were mainly based, on bulk piezoelectric substrates, which prevent the development of clip-scale devices. Here, we present a monolithically integrated Microelectromechanical systems (MEMS) device with great potential for on-chip quantum photonic applications. High-quality epitatal PMN-PT thin fillip have been. grown on SrTiO3 buffered Si and show excellent piezoelectric responses: Dense arrays of MEMS with small footprints are then fabricated based On these films, forming an on-chip strain tuning platform. After transferring, the QD-containing nanomembranes onto these MEMS, the nonclassical emissions (e.g., single photons) from single QDs can be engineered by:the strain fields. We envision that the strain tunable QD sources on the individually addressable and monolithically integrated MEMS pave the way toward complex quantum photonic applications on chip.