Integration of microbattery with thin-film electronics for constructing an integrated transparent microsystem based on InGaZnO

A full integration of miniaturized transparent energy device (lithium-ion battery), electronic device (thin-film transistor) and sensing device (photodetector) to form a monolithic integrated microsystem greatly enhances the functions of transparent electronics. Here, InGaZnO is explored to prepare the above devices and microsystem due to its multifunctional properties. A transparent lithium-ion battery with InGaZnO as anode (capacity similar to 9.8 mu Ah cm(-2)) is proposed as the on-chip power source. Then, thin-film transistor with InGaZnO as channel (mobility similar to 23.3 cm(2) V-1 s(-1)) and photodetector with InGaZnO as photosensitive layer (responsivity similar to 0.35 A W-1) are also prepared on the substrate for constructing an fully integrated transparent microsystem. Each device displays acceptable performance. Moreover, alternating-current signals can be successfully charged into the lithium-ion battery by using the thin-film transistor as the on-chip rectifier and also the photodetector works well by using the charged battery as the on-chip power, demonstrating collaborative capabilities of each device to achieve systematic functions.

Automated summary

A full integration of miniaturized transparent energy, electronic, and sensing devices using InGaZnO greatly enhances the functions of transparent electronics. Each device, including a transparent lithium-ion battery, a thin-film transistor, and a photodetector, demonstrates acceptable performance. The devices also show collaborative capabilities to achieve systematic functions, such as charging the battery with alternating-current signals using the thin-film transistor as a rectifier and using the charged battery as on-chip power for the photodetector.