High performance flexible PVDF film pressure sensor fabricated by femtosecond laser

Flexible pressure sensors have shown great potential for applications in detection and medical fields due to their unique piezoelectricity and high sensitivity. In this paper, micro-nano-perforated structures with different pe-riods and diameters are fabricated on the polyester (PET) films by femtosecond laser direct writing (FsLDW), and then the perforated structures are embossed on polyvinylidene fluoride (PVDF) films to form sensors with cir-cular truncated cone (CTC) structures. The effect of period and diameter on the sensitivity of the sensor is studied numerically and experimentally. The results show that the high sensitivity of 8.98 mV/KPa can be achieved in a PVDF film pressure sensor with a period of 50 mu m and a diameter of 30 mu m, which is about 10.9 times that of the structureless sensor. This work not only provide a fast fabricated method for the pressure sensor based on the femtosecond laser and hot embossing, but also has potential applications in the detection of the micro-signals.

Automated summary

This study utilizes femtosecond laser direct writing (FsLDW) to fabricate micro-nano-perforated structures with different periods and diameters on polyester (PET) films, and then embosses the perforated structures onto polyvinylidene fluoride (PVDF) films to create sensors with circular truncated cone (CTC) structures. The effect of period and diameter on sensor sensitivity is investigated numerically and experimentally. The results show that a high sensitivity of 8.98 mV/KPa can be achieved in a PVDF film pressure sensor with a period of 50 μm and a diameter of 30 μm, which is approximately 10.9 times that of the structureless sensor. This work not only provides a rapid fabrication method for pressure sensors using femtosecond laser and hot embossing, but also holds potential for micro-signal detection.