Fabrication of Specimens for Atom Probe Tomography Using a Combined Gallium and Neon Focused Ion Beam Milling Approach

We demonstrate a new focused ion beam sample preparation method for atom probe tomography. The key aspect of the new method is that we use a neon ion beam for the final tip-shaping after conventional annulus milling using gallium ions. This dual-ion approach combines the benefits of the faster milling capability of the higher current gallium ion beam with the chemically inert and higher precision milling capability of the noble gas neon ion beam. Using a titanium-aluminum alloy and a layered aluminum/aluminum-oxide tunnel junction sample as test cases, we show that atom probe tips prepared using the combined gallium and neon ion approach are free from the gallium contamination that typically frustrates composition analysis of these materials due to implantation, diffusion, and embrittlement effects. We propose that by using a focused ion beam from a noble gas species, such as the neon ions demonstrated here, atom probe tomography can be more reliably performed on a larger range of materials than is currently possible using conventional techniques.

Automated summary

We introduce a new method for focused ion beam sample preparation in atom probe tomography, involving the use of a neon ion beam for final tip shaping. This approach combines the advantages of faster milling with gallium ions and higher precision milling with neon ions. Our experiments with titanium-aluminum alloy and layered aluminum/aluminum-oxide tunnel junction samples demonstrate that the combined gallium and neon ion approach eliminates the gallium contamination that often hinders composition analysis. We propose that using a noble gas ion beam, such as neon, can expand the range of materials suitable for atom probe tomography beyond current capabilities.