4.7 Review

Advances in the surface acoustic wave sensors for industrial applications: Potentials, challenges, and future directions: A review

Related references

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Enhanced sensitivity of SAW based ammonia sensor employing GO-SnO2 nanocomposites

Xinyang Sun et al.

Summary: A GO-SnO2 nanocomposites coated surface acoustic wave (SAW) device was developed for highly sensitive detection of low concentration ammonia. The SnO2 nanocrystals were uniformly immobilized on the GO surface and exhibited porous structures. The gas adsorption in GO-SnO2 modulates the SAW propagation velocity, enabling the sensing of ammonia with a low detection limit of 40 ppb and high sensitivity of 0.098 mV/ppb.

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AlN/Sapphire-Based SAW Resonators With Q Over 10000 for Temperature Sensors

Yujie Ai et al.

Summary: In this study, a surface acoustic wave (SAW) resonator with high quality factors (Q) of 3526/10 205 at the resonant/antiresonant frequencies (f(r)/f(a)) was successfully fabricated on thick metal-organic chemical vapor deposition (MOCVD)-grown (0002) aluminum nitride (AlN) films (4 μm) on sapphire. The investigation on device parameters, including aspect ratio of length to width (L/W), number of interdigital transducers (IDTs), and IDT metal thickness, revealed that the high Q was achieved due to the large L/W value of 12 and the thick AlN film (4 μm). Furthermore, the resonator exhibited a high Q of 4027 at 250 °C and temperature coefficient of frequency (TCF) values of -46.52/-46.09 ppm/°C for f(r)/f(a) in the temperature range from -50 °C to 250 °C, showing promising potential for temperature sensor application.

IEEE SENSORS JOURNAL (2023)

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Novel SAW Temperature Sensor with Pt/Ti/AlN/Mo/AlN/Si Structure for High Temperature Application

Yong Ruan et al.

Summary: A Pt/Ti/AlN/Mo/AlN/Si structure surface acoustic wave (SAW) temperature sensor was prepared, and the high temperature characteristics were measured at 20-600 degrees C under different electrode metallization rates (eta). It was observed that frequent device mutation occurred in the first high-temperature test, and the mutation point decreased as the electrode metallization rate (eta) increased. Subsequent tests showed stable data, increased center frequency, decreased return loss (S11), and increased factor of merit (Q). Annealing the sensors at 600 degrees C for 30 min resulted in improved performance in the first test, indicating that proper annealing can enhance sensor performance. Furthermore, the annealed SAW sensor was tested in the temperature range of 20-1000 degrees C, meeting the requirement of a temperature range of 20-900 degrees C, with a linear f-T curve, a factor of merit (Q) of 34.5, and a sensitivity of 46.6 KHz/K.

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4.74-GHz Harmonically Operated SAW Temperature and Strain Sensors

Michael J. Morales J. Otero et al.

Summary: This paper presents the development of surface acoustic wave (SAW) temperature and strain sensors that can operate at high frequencies up to 4.74 GHz. The SAW device utilizes the third harmonic response to overcome the limitations of the contact photolithography process. An OFC SAW device initially designed for lithium niobate YZ is implemented on lithium niobate YX 128 cut, increasing the device's operating frequency. The SAW device demonstrates wireless temperature sensing capabilities with a standard deviation of 0.044C and good correlation with commercial strain sensors.

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High temperature effects on surface acoustic wave strain sensor

Jikai Zhang et al.

Summary: This paper investigates the temperature effects on SAW strain sensors and proposes a method to eliminate temperature effects. The results show that high temperature causes frequency drift and reduces strain transfer ratio. Accurate high-temperature strain measurements were conducted using the proposed method.

SENSORS AND ACTUATORS A-PHYSICAL (2022)

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Pd/Ni nanowire film coated SAW hydrogen sensor with fast response

Xinyu Wang et al.

Summary: In this study, a Pd/Ni nanowires film-coated surface acoustic wave (SAW) device was developed for fast response hydrogen sensing. The experimental results demonstrate that the sensor has fast response time, high sensitivity, and low detection limit at room temperature, as well as excellent selectivity and stability.

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Article Engineering, Electrical & Electronic

Sensitivity Enhancement of SAW Pressure Sensor Based on the Crystalline Direction

Maria Muzamil Memon et al.

Summary: This study presents a method for improving the pressure sensitivity of surface acoustic wave (SAW) sensors and verifies its effectiveness through experiments. The results show that the choice of crystal direction is crucial for enhancing the sensitivity of the sensor.

IEEE SENSORS JOURNAL (2022)

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Surface Acoustic Wave Strain Sensor With Ultra-Thin Langasite

Jikai Zhang et al.

Summary: This paper proposes an ultra-thin LGS SAW sensor with extended strain range and improved sensing accuracy in complex environments. The sensor utilizes a thin substrate and a custom calibration algorithm to achieve these improvements. The mechanism of temperature effects on strain sensitivity is investigated, and a new calibration method is developed to eliminate temperature effects.

IEEE SENSORS JOURNAL (2022)

Article Chemistry, Analytical

A Room-Temperature Surface Acoustic Wave Ammonia Sensor Based on rGO/DPP2T-TT Composite Films

Tien-Tsan Hung et al.

Summary: In this study, surface acoustic wave (SAW) sensors based on reduced graphene oxide/poly (diketopyrrolopyrrolethiophene-thieno [3,2-b]thiophene-thiophene) (rGO/DPP2T-TT) composite sensing films were successfully synthesized and used for ammonia detection. The sensors showed promising potential in detecting sub-ppm concentration levels of NH3 at room temperature.

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A Surface Acoustic Wave (SAW)-Based Lab-on-Chip for the Detection of Active α-Glycosidase

Mariacristina Gagliardi et al.

Summary: This study presents the development of a surface acoustic wave biosensor for the detection of active alpha-glycosidase in aqueous solutions. The biosensor was optimized to operate at an ultra-high frequency and functionalized with a newly synthesized probe. Preliminary data showed successful detection of enzymatic conversion and the biosensor performed well in the presence of an enzyme inhibitor.

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Novel Surface Acoustic Wave Temperature-Strain Sensor Based on LiNbO3 for Structural Health Monitoring

Xiangrong Li et al.

Summary: In this paper, the design of an integrated temperature and strain dual-parameter sensor based on surface acoustic waves (SAWs) is presented. The sensor consists of a temperature-sensitive unit and a strain-sensitive unit, with separate frequencies to avoid interference. The sensor's performance is tested in different temperature and strain ranges, showing high linearity and sensitivity. This sensor has potential applications in closed environments.

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Chong Li et al.

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High Performance SAW Resonators Using LiTaO3/SiO2/4H-SiC Multilayer Substrate

Ming Li et al.

Summary: SAW resonators based on 36 degrees YX-LiTaO3/SiO2/4H-SiC multilayer substrates are fabricated in this work to effectively suppress acoustic energy leakage. By using interdigital transducers (IDT) with a tilted angle, a multilayer resonator with transverse mode suppression is achieved. The results show that the multilayer resonator exhibits extremely high Bode-Q and impedance ratio, and achieves a high figure of merit.

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Haifeng Zhang et al.

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High-Frequency Surface Acoustic Wave Resonator with Diamond/AlN/IDT/AlN/Diamond Multilayer Structure

Liang Lei et al.

Summary: This article introduces a high-frequency SAW resonator based on a sandwiched structure, which improves its phase velocity and electromechanical coupling coefficient for better performance. The sandwiched structure can achieve an operating frequency of up to 6.15 GHz, with high electromechanical coupling coefficient and phase velocity, providing a new option for the design of high-performance and high-frequency SAW devices.

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Summary: A new configuration for surface acoustic wave (SAW) strain sensor is proposed to improve sensitivity and temperature stability, utilizing a differential dual-chip structure. The sensor demonstrates excellent temperature compensation, higher sensitivity, and satisfactory linearity within a detection range, with an estimated detection limit achieved. The sensor's performance was simulated, predicted, and confirmed through experiments.

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A langasite surface acoustic wave wide-range temperature sensor with excellent linearity and high sensitivity

Hongsheng Xu et al.

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Wen Wang et al.

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Wireless Readout of Multiple SAW Temperature Sensors

Gudrun Bruckner et al.

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High Temperature SAW Sensors on LiNbO3 Substrate With SiO2 Passivation Layer

Haotian Weng et al.

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