4.7 Article

A 3-DoF motion error measurement system based on film interferometry

Related references

Note: Only part of the references are listed.
Article Optics

Six-degree-of-freedom geometrical errors measurement system with compensation of laser beam drifts and installation errors for linear stage

Chi-Chen Lo et al.

Summary: In this paper, an optical measurement system is proposed to measure the 6DOF geometrical errors of a linear stage using the interferometric method and the geometrical optics method. The position error analysis is improved by solving the limitation of geometrical optics and a methodology to compensate for laser beam drifts and installation errors is also proposed. The feasibility of the proposed system is verified through experiments and comparisons with other measurement devices.

OPTICS AND LASERS IN ENGINEERING (2023)

Article Optics

Topography measurement of helical grooves on a hemisphere based on stitching interference microscopy

Jingyang Guo et al.

Summary: This paper presents a method of interference microscopy combined with subaperture stitching for measuring the topography of bearings with helical grooves. By utilizing a special fixture and a four-axis scanning platform, motion errors introduced in subaperture scanning are corrected through an iterative stitching algorithm. Experimental results demonstrate the effectiveness of this method and provide guidance for evaluating machining errors and bearing performance.

OPTICS AND LASER TECHNOLOGY (2022)

Article Engineering, Multidisciplinary

Characterization of diffractive relief structures over large areas by stitching interference microscopic topography

Wenwen Lu et al.

Summary: This paper presents a method for characterizing DOEs based on white light interferometry and subaperture stitching, which allows for multi-scale measurement of the surface topography over the full aperture. Experimental results demonstrate the effectiveness of this method.

MEASUREMENT (2022)

Article Engineering, Multidisciplinary

A novel scheme to measure 2D error motions of linear axes by regulating the direction of a laser interferometer

Soichi Ibaraki et al.

Summary: A novel scheme is proposed in this paper to measure the two-dimensional error motions of two linear axes using only a laser interferometer. This scheme offers practical advantages with lower implementation cost and simplicity. An experimental case study on a large-sized machine tool is presented along with uncertainty analysis.

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY (2021)

Article Engineering, Multidisciplinary

A miniature laser diode interferometer with self-compensation of retroreflector's motion errors for displacement feedback of small-sized micro/nano motion stages

Yindi Cai et al.

Summary: The study investigates the effects of retroreflector's motion errors on the measurement accuracy of a miniature laser diode interferometer and proposes a novel method to improve the system. By integrating error detectors and utilizing a compensation model, the MLDI system is enhanced to measure and compensate for retroreflector's motion errors, achieving multi-degree-of-freedom measurement. Experimental results validate the effectiveness of the proposed compensation model and the capabilities of the improved MLDI system.

MEASUREMENT (2021)

Article Optics

A Straightness Error Compensation System for Topography Measurement Based on Thin Film Interferometry

Hang Su et al.

Summary: The paper introduces a straightness measurement system based on fringe interferometry, which compensates for straightness error to achieve high-accuracy surface measurement. Experimental results show that the proposed film interferometer has good repeatability and a reasonable measurement deviation compared with a commercial confocal sensor.

PHOTONICS (2021)

Article Engineering, Multidisciplinary

A method for noise attenuation of straightness measurement based on laser collimation

Wenzheng Liu et al.

Summary: A method for noise attenuation of straightness measurement based on laser collimation was proposed to address the issue of atmospheric turbulence interference. The turbulence shield effectively reduced the impact of atmospheric turbulence on the measurement results, leading to improved accuracy and stability of the straightness measurement. Experimental results showed a significant decrease in standard deviations of straightness noise, with the effectiveness of the turbulence shield validated through simulations.

MEASUREMENT (2021)

Article Automation & Control Systems

Artificial Tactile Sensor With Pin-type Module for Depth Profile and Surface Topography Detection

Kwonsik Shin et al.

IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS (2020)

Article Chemistry, Multidisciplinary

A Differential Measurement System for Surface Topography Based on a Modular Design

Fang Cheng et al.

APPLIED SCIENCES-BASEL (2020)

Article Optics

Efficient subaperture stitching method for measurement of large area microstructured topography

Shanyong Chen et al.

OPTICS AND LASERS IN ENGINEERING (2020)

Article Automation & Control Systems

A high-precision laser method for directly and quickly measuring 21 geometric motion errors of three linear axes of computer numerical control machine tools

Fajia Zheng et al.

INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY (2020)

Article Chemistry, Multidisciplinary

Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors

Chuang Sun et al.

APPLIED SCIENCES-BASEL (2020)

Article Chemistry, Multidisciplinary

Surface Texture Measurement on Complex Geometry Using Dual-Scan Positioning Strategy

Fang Cheng et al.

APPLIED SCIENCES-BASEL (2020)

Article Engineering, Mechanical

On-Machine Measurement of the Straightness and Tilt Errors of a Linear Slideway Using a New Four-Sensor Method

Lei Zhao et al.

CHINESE JOURNAL OF MECHANICAL ENGINEERING (2019)

Article Engineering, Multidisciplinary

Residual flatness and scale calibration for a point autofocus surface topography measuring instrument

Giacomo Maculotti et al.

MEASUREMENT SCIENCE AND TECHNOLOGY (2019)

Article Chemistry, Analytical

Development of an Image Grating Sensor for Position Measurement

Shaowei Fu et al.

SENSORS (2019)

Article Instruments & Instrumentation

Sensor characterization by comparative measurements using a multi-sensor measuring system

Sebastian Hagemeier et al.

JOURNAL OF SENSORS AND SENSOR SYSTEMS (2019)

Article Engineering, Manufacturing

Measurement of Spindle Tilt Error Based on Interference Fringe

Pengqiang Fu et al.

INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING (2019)

Article Engineering, Multidisciplinary

Simultaneous multiple degrees of freedom (DoF) measurement system

G. Molnar et al.

MEASUREMENT SCIENCE AND TECHNOLOGY (2016)

Article Computer Science, Artificial Intelligence

Efficient Contrast Enhancement Using Adaptive Gamma Correction With Weighting Distribution

Shih-Chia Huang et al.

IEEE TRANSACTIONS ON IMAGE PROCESSING (2013)

Article Engineering, Multidisciplinary

Accuracy evaluation of two-dimensional straightness measurement method based on optical meter

Mindaugas Jurevicius et al.

MEASUREMENT (2013)