Enhanced H2S gas sensing of Pd functionalized NiO thin films deposited by the magnetron sputtering process

Article Engineering, Electrical & Electronic

Influence of heat treatment on H2S gas sensing features of NiO thin films deposited via thermal evaporation technique

Davoud Dastan et al.

Summary: In this study, NiO thin films were prepared on Ni foil using thermal evaporation method to investigate their structural, morphological and H2S gas sensing properties. XRD analysis revealed a FCC phase with preferred (111) and (200) Bragg reflections. Increasing the oxidation temperature led to an increase in crystallite size and size of nanoclusters on the film surface. EDS patterns showed an increase in O peak intensity with increasing oxidation temperature, indicating enhanced oxygen content. Raman spectrum revealed Ni-O vibrations in the thin films. Gas sensing results demonstrated sensitivity to 20 ppm H2S at 700 degrees C and no significant change in response for higher concentrations. The deposition temperature influenced the response of the sensors.

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING (2023)

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Article Materials Science, Multidisciplinary

Room temperature RF magnetron sputtered nanocrystalline NiO thin films for highly responsive and selective H2S gas sensing at low ppm concentrations

Stuti Srivastava et al.

Summary: We investigated the H2S gas sensing performance of nanocrystalline NiO thin films sputtered on an alumina substrate by RF magnetron sputtering. The films exhibited a granular morphology and hydrophobic nature (-123.5 degrees contact angle). Oxygen or nickel vacancies/defects were observed based on the PL spectrum and confirmed by XPS measurements. The NiO thin films showed high sensitivity, selectivity, and stability towards H2S gas, with a detection limit of 135 ppb and a maximum sensor response (Rg/Ra) of -28.8 for 200 ppm H2S gas at 400 degrees C.

MATERIALS RESEARCH BULLETIN (2023)

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Article Materials Science, Multidisciplinary

Preparation of nanocrystalline Pd/SnO2 thin films deposited on alumina substrate by reactive magnetron sputtering for efficient CO gas sensing

Amit Kumar Gangwar et al.

Summary: Nanocrystalline Pd/SnO2 thin films prepared by reactive magnetron sputtering on alumina substrate are used for highly sensitive and selective CO gas sensing. The films have nanocrystalline structure and uniform granular morphology, exhibiting excellent sensing performance for CO gas.

MATERIALS RESEARCH BULLETIN (2022)

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Article Materials Science, Multidisciplinary

Room temperature sputtered nanocrystalline SnO2 thin films sensitized with Pd nanoparticles for high performance CO gas sensing application

Amit Kumar Gangwar et al.

Summary: The present work demonstrates that Pd sensitized nanocrystalline SnO2 thin films show great potential for the development of CO gas sensors. These sensors exhibit excellent response and selectivity to CO gas, along with fast response and recovery times. Additionally, the Pd sensitized SnO2 thin films remain stable even after long periods of storage.

OPTICAL MATERIALS (2022)

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Article Materials Science, Multidisciplinary