4.3 Article

A phase error compensation method for three-dimensional shape measurement using improved iteration algorithm

Journal

JOURNAL OF MODERN OPTICS
Volume 70, Issue 8, Pages 457-469

Publisher

TAYLOR & FRANCIS LTD
DOI: 10.1080/09500340.2023.2266065

Keywords

Three-dimensional shape measurement; phase error compensation; iteration algorithm; phase shifting profilometry

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This paper proposes two models for calculating and compensating phase error by fusing phases at different precision and domains. Experimental results show that these two models can significantly reduce phase error.
The binary defocusing has been extensively studied in the three-dimensional measurement. But if the projector is slightly defocused, the binary fringes after defocusing still contain high-order harmonics compared with the ideal sinusoidal fringes, so the phase error caused by the nonlinear response is not negligible. In this paper, two models are proposed to calculate and compensate phase error, which include a double-precision iterative compensation model (DPICM) and a dual-domain iterative compensation model (DDICM). These two models obtain accurate phase errors by fusing the phases at different precision and domains. DPICM is composed of the double precision method and the improved iterative algorithm, and DDICM consists of the dual-domain method and the improved iterative algorithm. This improved iterative algorithm is used to compensate phase error, which can improve phase accuracy. DPICM and DDICM reduce the RMS error by 25.5% and 13.5% respectively.

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