4.5 Article

Preparation and Analysis of Atom Probe Tips by Xenon Focused Ion Beam Milling

Related references

Note: Only part of the references are listed.
Article Instruments & Instrumentation

Quantitative characterization of xenon bubbles in silicon: Correlation of bubble size with the damage generated during implantation

Klaus Wittmaack et al.

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS (2011)

Review Materials Science, Multidisciplinary

Applications of atom-probe tomography to the characterisation of solute behaviours

Emmanuelle A. Marquis et al.

MATERIALS SCIENCE & ENGINEERING R-REPORTS (2010)

Article Instruments & Instrumentation

On the effect of oxygen flooding on the detection of noble gas ions in a SIMS instrument

Peter Williams et al.

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS (2010)

Article Instruments & Instrumentation

Rapid-relocation model for describing high-fluence retention of rare gases implanted in solids

K. Wittmaack

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS (2009)

Article Microscopy

Clustering and nearest neighbour distances in atom-probe tomography

T. Philippe et al.

ULTRAMICROSCOPY (2009)

Article Chemistry, Physical

Focused ion beam implantation of Ga in Si and Ge: fluence-dependent retention and surface morphology

Hubert Gnaser et al.

SURFACE AND INTERFACE ANALYSIS (2008)

Article Materials Science, Multidisciplinary

Review of atom probe FIB-Based specimen preparation methods

Michael K. Miller et al.

MICROSCOPY AND MICROANALYSIS (2007)

Article Materials Science, Multidisciplinary

Spatial distribution maps for atom probe tomography

Brian P. Geiser et al.

MICROSCOPY AND MICROANALYSIS (2007)

Article Materials Science, Multidisciplinary

Focused ion beam microscopy and micromachining

C. A. Volkert et al.

MRS BULLETIN (2007)

Article Microscopy

In situ site-specific specimen preparation for atom probe tomography

K. Thompson et al.

ULTRAMICROSCOPY (2007)

Review Instruments & Instrumentation

Invited review article: Atom probe tomography

Thomas F. Kelly et al.

REVIEW OF SCIENTIFIC INSTRUMENTS (2007)

Article Physics, Condensed Matter

Fine structure effects and phase transition of Xe nanocrystals in Si

G. Faraci et al.

EUROPEAN PHYSICAL JOURNAL B (2006)

Article Engineering, Electrical & Electronic

Silicon etch process options for micro- and nanotechnology using inductively coupled plasmas

CC Welch et al.

MICROELECTRONIC ENGINEERING (2006)

Article Materials Science, Multidisciplinary

Damage in III-V compounds during focused ion beam milling

S Rubanov et al.

MICROSCOPY AND MICROANALYSIS (2005)

Article Instruments & Instrumentation

Measurement of xenon in uranium dioxide (UO2) with SIMS

L Desgranges et al.

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS (2004)

Article Microscopy

FIB-induced damage in silicon

S Rubanov et al.

JOURNAL OF MICROSCOPY (2004)

Article Engineering, Electrical & Electronic

Lift-out techniques coupled with advanced TEM characterization methods for electrical failure analysis

N Bicaïs-Lépinay et al.

MICROELECTRONICS RELIABILITY (2002)