Journal
MICROELECTRONIC ENGINEERING
Volume 153, Issue -, Pages 55-59Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.mee.2016.01.030
Keywords
Nanocone; Nanowire; Biomimetics; Moth-eye structure; Metal assisted etching
Categories
Funding
- KAKENHI Grant from the Japan Society for the Promotion of Science (JSPS) [25790024, 25600048, 15K04602]
- Ministry of Education, Culture, Sports, Science and Technology (MEXT)
- Kansai University
- Grants-in-Aid for Scientific Research [15K04602, 25600048, 25790024] Funding Source: KAKEN
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This work develops a novel method for preparing a moth eye structure, which has a sub-wavelength periodical Si nanocone structure on Si(100) substrate, using two-step metal assisted chemical etching (MACE). The 1st MACE and 2nd MACE were respectively performed with the intention to form perpendicular Si nanowire arrays on a Si substrate and sharpening the Si nanowire arrays. We found that the inhomogeneous absorption and aggregation of Au particles used as a catalyst for the 2nd MACE was important to obtain the nanocone shape. The obtained Si nanocone arrays showed superior anti-reflecting properties especially in a wavelength below 600 nm compared with the Si nanowire arrays. A possible mechanism involved in the formation of the nanocone structure by the 2 step MACE is discussed in this paper. (C) 2016 Elsevier B.V. All rights reserved.
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