Journal
MICROELECTRONIC ENGINEERING
Volume 164, Issue -, Pages 43-47Publisher
ELSEVIER
DOI: 10.1016/j.mee.2016.06.018
Keywords
MEMS; TEM; In-situ observation
Categories
Funding
- KAKENHI
- Japan Society for the Promotion of Science (JSPS) [15K20959]
- Tonen General Sekiyu Research & Development Encouragement Foundation
- JSPS Core-to-Core Program, Nanotechnology Platform [12024046]
- Elements Strategy Initiative for Structural Materials (ESISM) from the Ministry of Education, Culture, Sports, Science, and Technology in Japan (MEXT)
- [26246009]
- Grants-in-Aid for Scientific Research [15K20959, 15H02290, 25106003, 26249092] Funding Source: KAKEN
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An in-situ nanoscale observational and force measurement setup is a significant tool that is necessary for understanding the fundamental properties of materials. We have integrated two actuators and two beams into MEMS device, and then developed an experimental setup which enabled us to tilt the device around two axes and detect applied forces in two directions. To demonstrate the tilting capability, silicon tips made from a (100) wafer were prepared and the diffraction patterns of the specimen were observed, indicating that the observation direction was aligned on the [100] zone axis. Furthermore we successfully observed the peeling of a nano junction at the nano-scale while simultaneously detecting the x and y components of the applied forces in real-time. (C) 2016 Elsevier B.V. All rights reserved.
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