4.6 Article

Dynamic Mode Suppression and Frequency Tuning in S-Band GaN/YIG Magnetoelastic HBARs

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TUFFC.2023.3283183

Keywords

Acoustic materials; acoustic signal processing; cavity resonators; epitaxial layers; ferri-magnetic materials; gallium nitride; garnets; heterogeneous integration; magnetoacoustic effects; magnonics; microelectromechanical devices; phononics; piezoelectric transducers; tunable devices; tuning; yttrium compounds

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This study presents a detailed characterization and analysis of magnetoelastic high-overtone bulk acoustic resonators (ME-HBARs) operating in the S-band. These devices are fabricated by microtransfer printing piezoelectric GaN transducers onto a ferrimagnetic YIG substrate. The experiment demonstrates the hybridization of phonons and magnons in YIG, allowing for the suppression or tuning of acoustic modes in the ME-HBAR. The ME-HBARs can be used as dynamically tunable or switchable resonators, oscillators, comb filters, and frequency selective limiters in RF signal processing subcomponents.
This work presents the detailed characterization and analysis of recently reported magnetoelastic high-overtone bulk acoustic resonators (ME-HBARs), which are multimode RF-acoustic (phononic) resonators operating in the S-band. These unique devices are fabricated by microtransfer printing (MTP) piezoelectric GaN transducers onto a ferrimagnetic yttrium iron garnet (YIG) substrate. The YIG substrate also supports spin waves (magnons) when biased with an external magnetic field. The resulting phonon-magnon hybridization can be used to suppress or tune the acoustic modes of the ME-HBAR. The experiment spans 66 distinct acoustic resonance modes from 2.4 to 3 GHz, each of which can be suppressed or tuned as much as +/- 6 MHz, with a bias magnetic field <= 0.21 T. The experimental ME-HBAR data show good agreement with analytical modeling of the magnetoelastic hybridization in YIG. Such ME-HBARs can be used as dynamically tunable or switchable resonators, oscillators, comb filters, or frequency selective limiters in RF signal processing subcomponents. By integrating incompatible materials (YIG, epitaxial GaN) and disparate functionalities (spin waves, acoustic waves) into one hybrid multidomain system, this work also demonstrates the power and broad scope of the MTP technique.

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