Journal
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
Volume 70, Issue 10, Pages 1286-1294Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TUFFC.2023.3309997
Keywords
Micromechanical devices; Bandwidth; Acoustics; Damping; Sensitivity; Voltage measurement; Silicon; Air-coupling; capacitive micromachined ultrasonic transducer (CMUT); distance-sensing; dual-backplate (DBP); micro-electro-mechanical system (MEMS); ultrasound transducers
Categories
Ask authors/readers for more resources
This work presents novel airborne capacitive micromachined ultrasonic transducers (CMUTs) based on dual-backplate (DBP) technology. These transducers, unlike conventional CMUTs, employ a three-electrode capacitive system, enabling larger displacement amplitudes and wide adjustable bandwidth. The fabricated DBP-CMUT prototypes demonstrate high receive and transmit sensitivities, making them suitable for airborne ranging applications.
In this work, novel airborne capacitive micromachined ultrasonic transducers (CMUTs) based on a dual-backplate (DBP) technology are presented. In contrast to conventional CMUTs, these transducers use a three-electrode-based capacitive system, where the membrane is placed between two highly-perforated counter electrodes, enabling enlarged displacement amplitudes in electrostatic actuation and wide and tunable bandwidth (BW) due to a ventilated air cavity. Fabricated DBP-CMUT prototypes therefore show exceptionally high receive and transmit sensitivities of -34.5 dB(V/Pa) and 259 nm/V, respectively, in their 84-kHz resonance. The viscous dissipation introduced by ventilating the cavity results in a wide factional BW (FBW) of 29%. Applicability of the developed CMUT for airborne ranging is demonstrated in pulse-echo-based ranging measurements, where the distance of a sound-reflecting metal plate can be clearly detected by a single CMUT operated in a transceiver mode.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available