4.6 Article

Fabrication of the SiC Gate-All-Around JFET

Journal

IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume -, Issue -, Pages -

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2023.3299469

Keywords

Gate-all-around (GAA); high temperature; JFET; silicon carbide (SiC)

Ask authors/readers for more resources

Although silicon carbide integrated circuits (SiC ICs) have remarkable heat and radiation tolerances, the lack of performance in transistors is a significant hurdle to their widespread commercialization. This study focuses on improving transistors' performance by fabricating n-type lateral SiC JFETs with gate-all-around (GAA) structures. The results show that the GAA JFETs have high transconductance coefficients and little body bias effect, which makes them suitable for IC applications.
Although silicon carbide integrated circuits (SiC ICs) have remarkable heat and radiation tolerances, the lack of performance in transistors is a significant hurdle to their widespread commercialization. A higher transconductance coefficient is one of the key factors for improving transistors' performance. In this study, we have fabricated n-type lateral SiC JFETs with gate-all-around (GAA) structures to maximize their transconductance coefficients. The GAA structure was formed by high-energy Al ion implantation for the bottom layer and tilted one just after SiC gate etching for the side layers on the n-epitaxial layer of 4H-SiC. We obtained the transconductance coefficients 4.89, 3.90, and 3.19 mu A/V2 per channel for gate lengths 2, 3, and 4 mu m, respectively. The maximum terminal gain is 683 at 25 degrees C and about 160 at 250 degrees C-300 degrees C, suggesting that SiC ICs based on GAA JFETs could function well even at high temperatures. The JFETs show little body bias effect, which is also preferable for IC applications.

Authors

I am an author on this paper
Click your name to claim this paper and add it to your profile.

Reviews

Primary Rating

4.6
Not enough ratings

Secondary Ratings

Novelty
-
Significance
-
Scientific rigor
-
Rate this paper

Recommended

No Data Available
No Data Available