3.8 Article

Physical Mechanisms of SiO$_{2}$ Target Sputtering with Accelerated Ions of C$_{60}$

Journal

METALLOFIZIKA I NOVEISHIE TEKHNOLOGII
Volume 37, Issue 6, Pages 775-788

Publisher

Co. Ltd. Ukrinformnauka
DOI: 10.15407/mfint.37.06.0775

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