Journal
APPLIED SURFACE SCIENCE
Volume 638, Issue -, Pages -Publisher
ELSEVIER
DOI: 10.1016/j.apsusc.2023.158075
Keywords
CuI; Thin-film transistors; Self -assembled monolayer; Mobility; Current on; off ratio
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Self-assembled monolayer (SAM) treatment is effective for improving the electrical performance of organic thin-film transistors (TFTs) by reducing interface traps. However, it has been rarely explored in inorganic TFTs due to potential damage to thin SAMs during the deposition processes. This study demonstrates the feasibility of using SAM treatment on the gate dielectric of inorganic p-type Zn-doped CuI TFTs to enhance their performance significantly, including a reduction in interface trap density, an increase in hole mobility, an improvement in on/off ratio, and an enhancement in bias stress stability.
Self-assembled monolayer (SAM) treatment of gate dielectrics plays a key role in the improvement of the elec-trical performance of organic thin-film transistors (TFTs) by reducing the interface traps. However, it is rarely explored in inorganic TFTs owing to possible irreversible damage to very thin SAMs during the sputtering and high-temperature annealing processes that are often used to deposit inorganic materials. Here, the feasibility of performance enhancement of inorganic p-type Zn-doped CuI TFTs is explored by a SAM treatment using 3-amino-propyltriethoxysilane (APTES) on the gate dielectric. Our result shows that the TFT performance is significantly enhanced with a 50% reduction in the interface trap density, a 326% increase in the hole mobility from 0.38 to 1.24 cm2V-1s-1and a 5-fold increase in the current on/off ratio from 2.6 x 106 to 1.1 x 107. In addition, the bias stress stability of the TFTs after the treatment is dramatically enhanced by a factor of 10 due to the improved interface properties. The threshold voltage shift is reduced from +19.6 to +1.8 V after 3600 s positive bias stress. The simple yet effective interface treatment approach may have great potential in the fabrication of high-performance inorganic p-type electronic devices.
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