Journal
APPLIED PHYSICS LETTERS
Volume 123, Issue 11, Pages -Publisher
AIP Publishing
DOI: 10.1063/5.0161268
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Incorporating color centers in diamond with mature integrated photonics using hybrid integration techniques provides a promising approach for scalable quantum applications. By pick-flip-and-place approach, diamond nanostructures can be deterministically integrated on chip with a flat diamond-chip interface. This approach also facilitates diamond nanofabrication and enables the diamond nanobeam to function as a nanoscale quantum sensor.
Incorporating color centers in diamond with mature integrated photonics using hybrid integration techniques such as transfer printing provides a promising route toward scalable quantum applications. However, single-crystal diamond nanostructures fabricated using current etching technologies have triangular bottoms that are unsuitable for conventional pick-and-place integration. Herein, we present an alternative approach for deterministically integrating diamond nanostructures on chip. We demonstrate the hybrid integration of a diamond triangular nanobeam containing a nitrogen-vacancy ensemble on an SiO2 chip by picking it up using a weak adhesive film, flipping it, and transferring it to a stronger one. This pick-flip-and-place approach provides a flat diamond-chip interface, enabling the high-yield hybrid integration regardless of the shape of diamond nanostructures. Additionally, diamond nanofabrication is facilitated by transfer-printing hard masks for diamond etching. We also show that the integrated diamond nanobeam functions as a nanoscale quantum sensor. Our proposed approach paves the way toward scalable hybrid-diamond quantum photonics.
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