Journal
ACS NANO
Volume 17, Issue 20, Pages 20551-20559Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acsnano.3c07334
Keywords
gold; thin film; drum resonator; NEMS; mass sensing
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This study fabricates nanodrum resonators using nanometer-thick gold films as the drumheads and investigates their natural vibrations and mass sensitivity, finding that they can achieve high Q factors under specific conditions.
Nanodrum resonators have been fabricated using nanometer-thick gold films as the drumheads. The fabrication method is favorable for large-area array manufacture of arbitrary shapes. The drum resonators exhibit fundamental mode vibration frequencies in the MHz regime. We use the stretched-plate model to describe the natural vibrations of the drum. The Q factor of the fundamental mode increases as the thickness of the drum increases and decreases as the drum diameter goes up. The highest Q factor of the fundamental mode reaches 290 at room temperature and atmospheric pressure. Based on the deduced material properties we estimate that the resonator has a mass sensitivity of 1.11 x 10(-22) g/Hz.
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