Journal
MATERIALS LETTERS
Volume 177, Issue -, Pages 80-84Publisher
ELSEVIER
DOI: 10.1016/j.matlet.2016.04.171
Keywords
Thermoresistive effect; Temperature coefficient of resistance; Silicon nanowire; Amorphization; Focused ion beam
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In this work, we demonstrate highly thermosensitive silicon nanowires (SiNWs) for thermal-sensing applications. Crystalline Si was amorphized by Focused Ion Beam in the fabrication process of the SiNWs, and subsequently recrystallized by a thermal annealing process to improve their electrical conductivity. A temperature coefficient of resistance (TCR) from -8000 ppm/K to -12,000 ppm/K was measured for the SiNWs. This large negative TCR is attributed to the boundary potential barrier of 110 meV between silicon crystallites in the poly crystalline SiNWs. (C) 2016 Elsevier B.V. All rights reserved.
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