Journal
IEEE JOURNAL ON EMERGING AND SELECTED TOPICS IN CIRCUITS AND SYSTEMS
Volume 13, Issue 2, Pages 605-616Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JETCAS.2023.3270291
Keywords
Active matrix light-emitting diodes; active matrix LED; AMLED; micro-display; micro display system
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This paper demonstrates a fully-integrated active matrix light-emitting diode (AMLED) micro-display system. The system consists of a 36 x 64 AMLED array chip based on GaN-on-Silicon epilayers and a silicon driving chip integrating an on-chip hybrid voltage regulator, pixel drivers, and peripheral circuits. The system achieves high pixel density and can operate directly with a battery without any external passive components.
A fully-integrated active matrix light-emitting diode (AMLED) micro-display system is demonstrated in this paper. The system consists of a 36 x 64 AMLED array chip based on GaN-on-Silicon epilayers and a silicon driving chip integrating an on-chip hybrid voltage regulator, pixel drivers, and peripheral circuits. Then two chips are bonded with low-cost Au-free flip-chip bonding technology. As such, this system is able to directly operate with a battery without any external passive components. Multiple techniques were proposed to achieve the system integration: 1) A fully-integrated hybrid voltage regulator consisting of a step-up switched-capacitor (SC) converter cascaded by a step-down linear voltage regulator was fabricated in a 0.18 mu m CMOS technology. It achieved only 1.38% output voltage ripple without external capacitors, and be able to deliver a maximum power of 216mW with peak efficiencies of 91% in the linear mode and 78% in the SC mode; 2) Micro-LEDs are fabricated on GaN-on-Silicon substrate that significantly suppresses the light crosstalk between pixels and reduces the cost; 3) An Au-free flip-chip bonding technique is developed to reduce the bonding cost and achieved reliable connections between AMLED array chip and silicon driving chip. The whole system achieved 635 pixel/in (PPI) pixel density. Images and videos with 4-bit grayscale could be rendered. This prototype achieved a high integration level and demonstrates the tremendous potential of the highly efficient, low cost fully integrated AMLED micro-display system.
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