4.6 Article

Heterogeneous Multi-Material Flexible Piezoresistive Sensor with High Sensitivity and Wide Measurement Range

Journal

MICROMACHINES
Volume 14, Issue 4, Pages -

Publisher

MDPI
DOI: 10.3390/mi14040716

Keywords

soft sensors; pressure sensors; stress sensors; high dynamics range; graphene

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Flexible piezoresistive sensors (FPSs) are widely used in motion detection, wearable electronic devices, and electronic skins due to their compact structure, convenient signal acquisition, and fast dynamic response. However, a single material-based FPS cannot achieve both high sensitivity and a wide measurement range. To address this issue, a heterogeneous multi-material flexible piezoresistive sensor (HMFPS) with high sensitivity and a wide measurement range is proposed. The HMFPS utilizes a graphene foam as the sensing layer for high sensitivity and a PDMS layer as the supporting layer for a large measurement range. The use of heterogeneous multi-material proves to be an effective approach to produce flexible sensors with high performance. The HMFPS-10 demonstrates a sensitivity of 0.695 kPa(-1), a measurement range of 0-14,122 kPa, fast response/recovery (83 ms and 166 ms), and excellent stability (2000 cycles). The potential application of the HMFPS-10 in human motion monitoring is also demonstrated.
Flexible piezoresistive sensors (FPSs) have the advantages of compact structure, convenient signal acquisition and fast dynamic response; they are widely used in motion detection, wearable electronic devices and electronic skins. FPSs accomplish the measurement of stresses through piezoresistive material (PM). However, FPSs based on a single PM cannot achieve high sensitivity and wide measurement range simultaneously. To solve this problem, a heterogeneous multi-material flexible piezoresistive sensor (HMFPS) with high sensitivity and a wide measurement range is proposed. The HMFPS consists of a graphene foam (GF), a PDMS layer and an interdigital electrode. Among them, the GF serves as a sensing layer, providing high sensitivity, and the PDMS serves as a supporting layer, providing a large measurement range. The influence and principle of the heterogeneous multi-material (HM) on the piezoresistivity were investigated by comparing the three HMFPS with different sizes. The HM proved to be an effective way to produce flexible sensors with high sensitivity and a wide measurement range. The HMFPS-10 has a sensitivity of 0.695 kPa(-1), a measurement range of 0-14,122 kPa, fast response/recovery (83 ms and 166 ms) and excellent stability (2000 cycles). In addition, the potential application of the HMFPS-10 in human motion monitoring was demonstrated.

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