Related references
Note: Only part of the references are listed.ON THE DESIGN OF PIEZOELECTRIC MEMS MICROSPEAKER WITH HIGH FIDELITY AND WIDE BANDWIDTH
Ting-Chou Wei et al.
2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS (2023)
A PIEZOELECTRIC MEMS SPEAKER WITH STRETCHABLE FILM SEALING
Linbing Xu et al.
2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS (2023)
MONOLITHIC INTEGRATION OF PZT ACTUATION UNITS OF VARIOUS ACTIVATED RESONANCES FOR FULL-RANGE MEMS SPEAKER ARRAY
Hsu-Hsiang Cheng et al.
2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS (2023)
Design of a Novel Medical Acoustic Sensor Based on MEMS Bionic Fish Ear Structure
Chenzheng Zhou et al.
MICROMACHINES (2022)
A Novel MEMS Capacitive Microphone with Semiconstrained Diaphragm Supported with Center and Peripheral Backplate Protrusions
Shubham Shubham et al.
MICROMACHINES (2022)
Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions
Chengze Liu et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2022)
Recent development and futuristic applications of MEMS based piezoelectric microphones
Ashish Kumar et al.
SENSORS AND ACTUATORS A-PHYSICAL (2022)
Temperature Stable Piezoelectric Imprint of Epitaxial Grown PZT for Zero-Bias Driving MEMS Actuator Operation
Marco Teuschel et al.
MICROMACHINES (2022)
Piezoelectric bimorph MEMS speakers
Yiming Lang et al.
NANOTECHNOLOGY AND PRECISION ENGINEERING (2022)
A Surface-Micromachined Levitating MEMS Speaker
Antoine Verreault et al.
2022 20TH IEEE INTERREGIONAL NEWCAS CONFERENCE (NEWCAS) (2022)
A THIN-FILM PIEZOELECTRIC SPEAKER BASED ON AN ACTIVE MICROSTRUCTURE ARRAY
Jinchi Han et al.
2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS) (2022)
PIEZOELECTRIC MEMS SPEAKER WITH RIGID-FLEXIBLE-COUPLING ACTUATION LAYER
Qi Wang et al.
2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS) (2022)
Design and analysis of piezoelectric MEMS micro-speaker based on scandium-doped AlN thin film
Ahmed Fawzy et al.
MICRO & NANO LETTERS (2021)
Obtaining High SPL Piezoelectric MEMS Speaker via a Rigid-Flexible Vibration Coupling Mechanism
Qi Wang et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2021)
Coupled D33 Mode-Based High Performing Bio-Inspired Piezoelectric MEMS Directional Microphone
Ashiqur Rahaman et al.
APPLIED SCIENCES-BASEL (2021)
Review of Recent Development of MEMS Speakers
Haoran Wang et al.
MICROMACHINES (2021)
Wearable multifunctional piezoelectric MEMS device for motion monitoring, health warning, and earphone
Qi Wang et al.
NANO ENERGY (2021)
Directional Sound Sensor With Consistent Directivity and Sensitivity in the Audible Range
Sungchan Kang et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2021)
On the PZT/Si unimorph cantilever design for the signal-to-noise ratio enhancement of piezoelectric MEMS microphone
Yu-Chen Chen et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2021)
Feasibility of Using a MEMS Microphone Array for Pedestrian Detection in an Autonomous Emergency Braking System
Alberto Izquierdo et al.
SENSORS (2021)
Mechanical Energy Sensing and Harvesting in Micromachined Polymer-Based Piezoelectric Transducers for Fully Implanted Hearing Systems: A Review
Rhonira Latif et al.
POLYMERS (2021)
TWO-WAY PIEZOELECTRIC MEMS MICROSPEAKER WITH NOVEL STRUCTURE AND ELECTRODE DESIGN FOR BANDWIDTH ENHANCEMENT
Yu-Tzu Lin et al.
2021 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) (2021)
MEMS MICROPHONE WITH 73dBA SNR IN A 4mm x 3mm x 1.2mm PACKAGE
Vahid Naderyan et al.
2021 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) (2021)
HEART SOUND MONITORING BASED ON A PIEZOELECTRIC MEMS ACOUSTIC SENSOR
Mengjiao Qu et al.
2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021) (2021)
A 139μW 104.8dB-DR 24kHz-BW CTΔΣM with Chopped AC-Coupled OTA-Stacking and FIR DACs
Somok Mondal et al.
2021 IEEE INTERNATIONAL SOLID-STATE CIRCUITS CONFERENCE (ISSCC) (2021)
Modeling and Characterization of a Pull-in Free MEMS Microphone
Mehmet Ozdogan et al.
IEEE SENSORS JOURNAL (2020)
On the design of piezoelectric MEMS microspeaker for the sound pressure level enhancement
Hsu-Hsiang Cheng et al.
SENSORS AND ACTUATORS A-PHYSICAL (2020)
A Review of MEMS Capacitive Microphones
Siti Aisyah Zawawi et al.
MICROMACHINES (2020)
Acoustic Microfluidics
Peiran Zhang et al.
ANNUAL REVIEW OF ANALYTICAL CHEMISTRY, VOL 13 (2020)
A Novel MEMS Speaker With Peripheral Electrostatic Actuation
Meera Vikas Garud et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2020)
A high-SPL piezoelectric MEMS loud speaker based on thin ceramic PZT
Haoran Wang et al.
SENSORS AND ACTUATORS A-PHYSICAL (2020)
Design and characterization of a MEMS piezoelectric acoustic sensor with the enhanced signal-to-noise ratio
Ashiqur Rahaman et al.
SENSORS AND ACTUATORS A-PHYSICAL (2020)
Active Noise Cancellation With MEMS Resonant Microphone Array
Hai Liu et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2020)
A Modeling and Feasibility Study of a Micro-Machined Microphone Based on a Field-Effect Transistor and an Electret for a Low-Frequency Microphone
Kumjae Shin et al.
SENSORS (2020)
A 550-μW 20-kHz BW 100.8-dB SNDR Linear-Exponential Multi-Bit Incremental ΣΔ ADC With 256 Clock Cycles in 65-nm CMOS
Biao Wang et al.
IEEE JOURNAL OF SOLID-STATE CIRCUITS (2019)
Highly sensitive spintronic strain-gauge sensor and Spin-MEMS microphone
Yoshihiko Fuji et al.
JAPANESE JOURNAL OF APPLIED PHYSICS (2019)
Continuous Health Monitoring With Resonant-Microphone-Array-Based Wearable Stethoscope
Anton A. Shkel et al.
IEEE SENSORS JOURNAL (2019)
Effect of Torsional Beam Length on Acoustic Functionalities of Bio-Inspired Piezoelectric MEMS Directional Microphone
Ashiqur Raha et al.
IEEE SENSORS JOURNAL (2019)
Design and Characterization of a Micro-Fabricated Graphene-Based MEMS Microphone
Graham S. Wood et al.
IEEE SENSORS JOURNAL (2019)
Packaging Technology for an Implantable Inner Ear MEMS Microphone
Lukas Prochazka et al.
SENSORS (2019)
Bio-Inspired Rectangular Shaped Piezoelectric MEMS Directional Microphone
Ashiqur Rahman et al.
IEEE SENSORS JOURNAL (2019)
Design and Fabrication of Silicon Nanowire-based MEMS Microphones
Seunghyun Lee et al.
2019 19TH INTERNATIONAL CONFERENCE ON CONTROL, AUTOMATION AND SYSTEMS (ICCAS 2019) (2019)
NOVEL HINGE MECHANISM FOR VACUUM TRANSDUCTION HIGH PERFORMANCE CAPACITIVE MEMS MICROPHONES
Samer Dagher et al.
2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (2019)
IMPLEMENTATION OF TWO-POLY DIFFERENTIAL MEMS MICROPHONES FOR SNR AND SENSING RANGE ENHANCEMENT
Sung-Cheng Lo et al.
2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) (2019)
PIEZOELECTRIC MEMS MICROSPEAKER WITH SUSPENSION SPRINGS AND DUAL ELECTRODE TO ENHANCE SOUND PRESSURE LEVEL
Hsu-Hsiang Cheng et al.
2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) (2019)
MEMS Capacitive Microphones: Acoustical, Electrical, and Hidden Thermal-Related Issues
Germano Nicollini et al.
IEEE SENSORS JOURNAL (2018)
Spin-MEMS microphone integrating a series of magnetic tunnel junctions on a rectangular diaphragm
Yoshihiko Fuji et al.
JOURNAL OF APPLIED PHYSICS (2018)
Design and fabrication of very small MEMS microphone with silicon diaphragm supported by Z-shape arms using SOI wafer
Bahram Azizollah Ganji et al.
SOLID-STATE ELECTRONICS (2018)
The Evolution of Integrated Interfaces for MEMS Microphones
Piero Malcovati et al.
MICROMACHINES (2018)
A Low Quiescent Current, Low THD plus N Class-D Audio Amplifier With Area-Efficient PWM-Residual-Aliasing Reduction
Shih-Hsiung Chien et al.
IEEE JOURNAL OF SOLID-STATE CIRCUITS (2018)
Design and Modeling of a MEMS Dual-Backplate Capacitive Microphone with Spring-Supported Diaphragm for Mobile Device Applications
Nestor N. Pena-Garcia et al.
SENSORS (2018)
Spiral-Shaped Piezoelectric MEMS Cantilever Array for Fully Implantable Hearing Systems
Peter Udvardi et al.
MICROMACHINES (2017)
A 106 dB A-Weighted DR Low-Power Continuous-Time ΣΔ Modulator for MEMS Microphones
Claudio De Berti et al.
IEEE JOURNAL OF SOLID-STATE CIRCUITS (2016)
Embedded Single-Inductor Bipolar-Output DC-DC Converter in Class-D Amplifier for Low Common Noise
Shin-Hao Chen et al.
IEEE TRANSACTIONS ON POWER ELECTRONICS (2016)
Modeling and validation of acoustic performances of micro-acoustic sources for hearing applications
Giorgio De Pasquale et al.
SENSORS AND ACTUATORS A-PHYSICAL (2016)
The effects of electrodes patterned onto the piezoelectric thin film on frequency response characteristics of PMN-PT MEMS acoustic actuators
H. J. Kim et al.
JOURNAL OF ELECTROCERAMICS (2015)
A Micro-Machined Microphone Based on a Combination of Electret and Field-Effect Transistor
Kumjae Shin et al.
SENSORS (2015)
Linearizing an electrostatically driven MEMS speaker by applying pre-distortion
David Tumpold et al.
SENSORS AND ACTUATORS A-PHYSICAL (2015)
Low-voltage Driven Graphene Foam Thermoacoustic Speaker
Wenwen Fei et al.
SMALL (2015)
Micro-acoustic source for hearing applications fabricated with 0.35μm CMOS-MEMS process
Libor Rufer et al.
EUROSENSORS 2015 (2015)
A Novel Method for Reducing the Sensitivity Deviation of MEMS Microphones by Programming
S. Walser et al.
EUROSENSORS 2015 (2015)
Analog Front-End Circuitry in Piezoelectric and Microphone Detection of Photoacoustic Signals
Tomasz Starecki
INTERNATIONAL JOURNAL OF THERMOPHYSICS (2014)
Optimization and Microfabrication of High Performance Silicon-Based MEMS Microspeaker
Iman Shahosseini et al.
IEEE SENSORS JOURNAL (2013)
Fabrication of a dual-planar-coil dynamic microphone by MEMS techniques
Ray-Hua Horng et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2010)
Bang-Bang Control Class D Amplifiers: Total Harmonic Distortion and Supply Noise
Tong Ge et al.
IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS I-REGULAR PAPERS (2009)
Design and fabrication of a new MEMS capacitive microphone using a perforated aluminum diaphragm
Bahram Azizollah Ganji et al.
SENSORS AND ACTUATORS A-PHYSICAL (2009)
A compact, low-power, and electromagnetically actuated microspeaker for hearing aids
Sang-Soo Je et al.
IEEE ELECTRON DEVICE LETTERS (2008)
Flexible, Stretchable, Transparent Carbon Nanotube Thin Film Loudspeakers
Lin Xiao et al.
NANO LETTERS (2008)
High-performance condenser microphone with single-crystalline silicon diaphragm and backplate
Masahide Goto et al.
IEEE SENSORS JOURNAL (2007)
A silicon microspeaker for hearing instruments
MC Cheng et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2004)
Behavioral modeling of switched-capacitor Sigma-Delta modulators
P Malcovati et al.
IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS I-FUNDAMENTAL THEORY AND APPLICATIONS (2003)