Recent Trends in Structures and Interfaces of MEMS Transducers for Audio Applications: A Review

In recent years, Micro-Electro-Mechanical Systems (MEMS) technology has had an impressive impact in the field of acoustic transducers, allowing the development of smart, low-cost, and compact audio systems that are employed in a wide variety of highly topical applications (consumer devices, medical equipment, automotive systems, and many more). This review, besides analyzing the main integrated sound transduction principles typically exploited, surveys the current State-of-the-Art scenario, presenting the recent performance advances and trends of MEMS microphones and speakers. In addition, the interface Integrated Circuits (ICs) needed to properly read the sensed signals or, on the other hand, to drive the actuation structures are addressed with the aim of offering a complete overview of the currently adopted solutions.

Automated summary

In recent years, MEMS technology has had a significant impact in the field of acoustic transducers, enabling the development of smart, low-cost, and compact audio systems. This review analyzes the main integrated sound transduction principles and surveys the State-of-the-Art scenario of MEMS microphones and speakers. It also addresses the interface Integrated Circuits (ICs) needed for signal processing and actuation in these systems.