Influence of the Sputtering Temperature on Reflectivity and Electrical Properties of ITO/AgIn/ITO Composite Films for High-Reflectivity Anodes

In this paper, indium tin oxide/silver indium/indium tin oxide (ITO/AgIn/ITO) composite films were deposited on glass substrates by magnetron sputtering. The effects of the sputtering temperature on the optical and electrical properties of the composite films were systematically investigated. The ITO/AgIn/ITO composite films deposited at sputtering temperatures of 25 degrees C and 100 degrees C demonstrated a high reflectivity of 95.3% at 550 nm and a resistivity of about 6.8-7.3 mu Omega center dot cm. As the sputtering temperature increased, the reflectivity decreased and the resistivity increased slightly. The close connection between microstructure and surface morphology and the optical and electrical properties of the composite films was further illustrated by scanning electron microscopy imaging and atomic force microscopy imaging. It is shown that the ITO/AgIn/ITO thin films have a promising application for high-reflectivity anodes.

Automated summary

In this study, ITO/AgIn/ITO composite films were deposited on glass substrates using magnetron sputtering. The effects of sputtering temperature on the optical and electrical properties of the films were investigated. The results showed that the films deposited at 25°C and 100°C exhibited high reflectivity and low resistivity, making them promising for high-reflectivity anodes.