Journal
MATERIALS
Volume 16, Issue 5, Pages -Publisher
MDPI
DOI: 10.3390/ma16051917
Keywords
nano-alloy; Si-Cr; Si nano-needles; sub-100 nm; nanoscale
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Ultra-short 230 fs laser pulses of 515 nm wavelength were focused to 700 nm spots on a Cr etch mask, creating similar to 400 nm nano-holes. The ablation threshold was found to be 2.3 nJ/pulse, and lower energies produced nano-disks while higher energies produced nano-rings. The controlled alloying of Si and Cr on large surface areas with sub-diffraction resolution was achieved using subtle sub-1 nJ pulse energy control.
Ultra-short 230 fs laser pulses of 515 nm wavelength were tightly focused into 700 nm focal spots and utilised in opening similar to 400 nm nano-holes in a Cr etch mask that was tens-of-nm thick. The ablation threshold was found to be 2.3 nJ/pulse, double that of plain silicon. Nano-holes irradiated with pulse energies below this threshold produced nano-disks, while higher energies produced nano-rings. Both these structures were not removed by either Cr or Si etch solutions. Subtle sub-1 nJ pulse energy control was harnessed to pattern large surface areas with controlled nano-alloying of Si and Cr. This work demonstrates vacuum-free large area patterning of nanolayers by alloying them at distinct locations with sub-diffraction resolution. Such metal masks with nano-hole opening can be used for formation of random patterns of nano-needles with sub-100 nm separation when applied to dry etching of Si.
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