Journal
VACUUM
Volume 211, Issue -, Pages -Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2023.111925
Keywords
Antimony sulfide; Thin films; Magnetron sputtering; Laser treatment
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One drawback of untreated Sb2S3 thin films is the lack of crystallinity, which can be improved by laser irradiation. In this study, RF-sputtered Sb2S3 thin films were treated with a continuous CO2 laser. The laser treatment resulted in crystallization and a change in sample morphology from cracked to more dense/homogeneous. The structural and morphological changes induced by laser irradiation also improved the optical and electrical properties, including an increase in optical and photoconductivity properties.
One of the drawbacks of Sb2S3 thin films is the lack of crystallinity if no thermal treatment is applied. The interest for the development of crystallinity is to improve their properties. Thus, laser irradiation could provide sufficient energy to improve the crystallinity in the above-indicated material. In this work, Radio Frequency (RF)-sputtered Sb2S3 thin films were irradiated with a continuous CO2 laser. Laser treated samples showed crystallization corresponding to the stibnite phase (Sb2S3). Furthermore, the morphology of the sample changed from a cracked surface (before irradiation) to a more dense/homogeneous film (after irradiation). The structural and morpho-logical changes induced by laser irradiation tend to improve the optical and electrical properties aside the crystalline one. When the sample was treated with laser, an increase in optical and photoconductivity properties were detected. The results presented here demonstrate the possibility of improving the quality of Sb2S3 films when a far-infrared laser is applied.
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