4.7 Article

Integratable micro-optical compound objective lens using soft lithography

Journal

SENSORS AND ACTUATORS A-PHYSICAL
Volume 360, Issue -, Pages -

Publisher

ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2023.114512

Keywords

Microfabrication; Direct Laser Writing (DLW); Two-photon polymerization (2PP); PDMS casting; Micro-optics; Micro-lenses; Microsystems integration

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This study presents a novel method for fabricating complex free-form microlenses and miniature microscope objectives that can be seamlessly integrated into microsystems and photonic devices. The method combines 3D printed molds, using direct laser writing two-photon polymerization, and soft lithography techniques, demonstrating exceptional design flexibility and excellent optical performance of the lenses. The ability to combine multiple lenses to produce complex micro-optical imaging objectives further highlights the potential of this technology for the rapid and cost-effective fabrication of sophisticated micro-optical components.
The production of microlenses with complex geometries that can be seamlessly integrated into microsystems and photonic devices presents a formidable challenge. In this study, we introduce a novel method for fabricating complex free-form microlenses and miniature microscope objectives that are readily integrable into microsystems. This approach combines 3D printed molds, using direct laser writing two-photon polymerization, and soft lithography techniques to create compound microlenses with exceptional design flexibility. The optical performance of these lenses was found to be in excellent agreement with theoretical simulations. Furthermore, we demonstrate the ability to combine multiple lenses to produce complex micro-optical imaging objectives with magnifications ranging from 3x to 10x. Occupying a very small footprint of just a few mm2, these objectives exhibit high optical quality with minimal levels of aberration. Our results highlight the potential of this new technology for the rapid, accurate, and cost-effective fabrication of sophisticated micro-optical components, which can be readily integrated into microsystems, photonic devices, and sensors. This approach represents an exciting avenue for the development of high-performance micro-optical systems, and holds tremendous promise for advancing research across numerous scientific disciplines.

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