Nonthermal plasma synthesis of silicon carbonitride

The use of a low-temperature plasma for the synthesis of amorphous silicon carbonitride (SiCN) nanoparticles enables the realization of sintered bulk samples with high thermal stability. Amorphous SiCN nanoparticles are produced from a mixture of silane, methane, and ammonia utilizing a mid-pressure, radio-frequency, continuous flow reactor. Particle characterization shows that the nanoparticles are largely amorphous with some crystalline silicon and silicon carbide domains <10 nm in size. Compositional tuning, controlled by varying the precursor flow rates, coupled with the uniform mixing of elements at the nanoscale, results in samples that resist crystallization even when sintered at temperatures as high as 2000 degrees C. This study suggests that the low-temperature plasma synthesis of nanoparticles has great potential to produce bulk structural materials for application in harsh environments.

Automated summary

The use of low-temperature plasma allows for the synthesis of amorphous silicon carbonitride (SiCN) nanoparticles, which can be sintered into bulk samples with high thermal stability. By adjusting precursor flow rates, the composition of the nanoparticles can be controlled, resulting in high resistance to crystallization even at high sintering temperatures. This study suggests that low-temperature plasma synthesis has great potential for producing structural materials for harsh environments.