Journal
OPTICS EXPRESS
Volume 31, Issue 15, Pages 23790-23800Publisher
Optica Publishing Group
DOI: 10.1364/OE.491552
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Novel back-illuminated modified uni-traveling-carrier photodiodes (MUTC-PDs) with wide bandwidth and high saturation power are demonstrated. The effect of cliff layer doping on the electric field distribution is investigated to achieve fast carrier transport. MUTC-PDs with miniaturized device diameter and low contact resistance are fabricated to improve the RC-limited bandwidth. Meanwhile, inductive peaking is implemented to further extend the bandwidth. PDs with 3-pm and 3.6-pm-diameter exhibit a ultrawide bandwidth of 230 GHz and 200 GHz, together with -4.94 dBm and -2.14 dBm saturation power at 220 GHz and 200 GHz, respectively.
Novel back-illuminated modified uni-traveling-carrier photodiodes (MUTC-PDs) with wide bandwidth and high saturation power are demonstrated. The effect of cliff layer doping on the electric field distribution is investigated to achieve fast carrier transport. MUTC-PDs with miniaturized device diameter and low contact resistance are fabricated to improve the RC-limited bandwidth. Meanwhile, inductive peaking is implemented to further extend the bandwidth. PDs with 3-pm and 3.6-pm-diameter exhibit a ultrawide bandwidth of 230 GHz and 200 GHz, together with -4.94 dBm and -2.14 dBm saturation power at 220 GHz and 200 GHz, respectively. & COPY; 2023 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
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