Journal
OPTICS EXPRESS
Volume 31, Issue 9, Pages 14174-14184Publisher
Optica Publishing Group
DOI: 10.1364/OE.483524
Keywords
-
Categories
Ask authors/readers for more resources
In this paper, a highly uniform parallel two-photon lithography method based on a digital mirror device (DMD) and microlens array (MLA) is proposed to generate thousands of femtosecond (fs) laser foci with individual on-off switching and intensity-tuning capability. The experiments demonstrate the parallel fabrication of sub-diffraction limit features and the potential for rapid fabrication of large-scale 3D structures.
The limited throughput of nano-scale laser lithography has been the bottleneck for its industrial applications. Although using multiple laser foci to parallelize the lithography process is an effective and straightforward strategy to improve rate, most conventional multi-focus methods are plagued by non-uniform laser intensity distribution due to the lack of individual control for each focus, which greatly hinders the nano-scale precision. In this paper, we present a highly uniform parallel two-photon lithography method based on a digital mirror device (DMD) and microlens array (MLA), which allows the generation of thousands of femtosecond (fs) laser foci with individual on-off switching and intensity-tuning capability. In the experiments, we generated a 1,600-laser focus array for parallel fabrication. Notably, the intensity uniformity of the focus array reached 97.7%, where the intensity-tuning precision for each focus reached 0.83%. A uniform dot array structure was fabricated to demonstrate parallel fabrication of sub-diffraction limit features, i.e., below 1/4 lambda or 200 nm. The multi-focus lithography method has the potential of realizing rapid fabrication of sub-diffraction, arbitrarily complex, and large-scale 3D structures with three orders of magnitude higher fabrication rate.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available