Method for measuring thermal accommodation coefficients of gases on thin film surfaces using a MEMS sensor structure

A method for measuring the thermal accommodation coefficient a for surface-/gas interfaces is presented. It allows the determination of a for thin films produced by a variety of deposition technologies, such as chemical vapor deposition, physical vapor deposition, and atomic layer deposition (ALD). The setup is based on two microelectromechanical systems (MEMS) Pirani sensors facing each other in a defined positioning. Because these MEMS sensors show a very high sensitivity in their individual molecular flow regimes, it is possible to measure the accommodation coefficients of gases without the disturbing influence of the transition regime. This paper presents the analytical background and the actual measurement principle. The results for air and nitrogen molecules on sputtered Au and Pt surfaces are presented. (C) 2016 American Vacuum Society.