Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 34, Issue 5, Pages -Publisher
A V S AMER INST PHYSICS
DOI: 10.1116/1.4959532
Keywords
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Funding
- Northwestern University Institute for Catalysis in Energy Processes (ICEP)
- U.S. Department of Energy, Office of Basic Energy Science [DE-FG02-03-ER15457]
- National Science Foundation Graduate Research Fellowship [DGE-1324585]
- Northwestern University
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Three molybdenum precursors-bis(acetylacetonate) dioxomolybdenum, molybdenum isopropoxide, and bis(ethylbenzene) molybdenum-were tested for molybdenum oxide vapor deposition. Quartz crystal microbalance studies were performed to monitor growth. Molybdenum isopropoxide and bis(ethylbenzene) molybdenum achieved linear growth rates 0.01 and 0.08 angstrom/cycle, respectively, using atomic layer deposition techniques. Negligible MoOx growth was observed on alumina powder using molybdenum isopropoxide, as determined by inductively coupled plasma optical emission spectroscopy. Bis(ethylbenzene) molybdenum achieved loadings of 0.5, 1.1, and 1.9 Mo/nm(2) on alumina powder after one, two, and five cycles, respectively, using atomic layer deposition techniques. The growth window for bis(ethylbenzene) molybdenum is 135-150 degrees C. An alternative pulsing strategy was also developed for bis(ethylbenzene) molybdenum that results in higher growth rates in less time compared to atomic layer deposition techniques. The outlined process serves as a methodology for depositing molybdenum oxide for catalytic applications. All as-deposited materials undergo further calcination prior to characterization and testing. (C) 2016 American Vacuum Society.
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