Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 56, Issue 37, Pages -Publisher
IOP Publishing Ltd
DOI: 10.1088/1361-6463/acd19d
Keywords
GaN; selective area etching; lateral regrowth; selective area doping; p-n junction; power devices
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Selective area doping in GaN, especially p-type, is crucial for advanced device structures in high-power applications. This paper reviews recent advances in selective area etching and regrowth, ion implantation, and polarity-dependent doping, which may contribute to the practical realization of GaN-based power devices.
Selective area doping in GaN, especially p-type, is a critical and inevitable building block for the realization of advanced device structures for high-power applications, including, but not limited to, current-aperture vertical electron transistors, junction termination extensions, junction barrier Schottky diodes, junction field-effect transistors (JFETs), vertical-channel JFETs, U-shaped metal-oxide-semiconductor field-effect transistors (U-MOSFETs), and Fin MOSFETs. This paper reviews and summarizes some of the recent advances in the fields of selective area etching and regrowth, ion implantation, and polarity-dependent doping that may lead to the practical realization of GaN-based power devices.
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