Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 33, Issue 4, Pages -Publisher
IOP Publishing Ltd
DOI: 10.1088/1361-6439/acb957
Keywords
bridge-type source read-out circuit; cardiac troponin microsensor; extended gate field-effect transistor; microelectromechanical systems; temperature compensation; temperature correction
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In this study, we developed a three-dimensional microsensor based on an extended gate field-effect transistor (EGFET) using microelectromechanical systems (MEMS) technology for the detection of cardiac troponin (cTnI). The microsensor exhibited high sensitivity and linearity in the tested concentration ranges. Bridge-type source read-out, temperature correction, and temperature compensation circuits were also successfully designed to minimize the influence of temperature on the sensing signals.
In this study, we used microelectromechanical systems (MEMS) technology to design a three-dimensional microsensor, which is based on an extended gate field-effect transistor (EGFET), to detect cardiac troponin (cTnI). A planar micro-reference electrode was integrated onto the same chip. All fabrication processes were compatible with integrated circuit and MEMS technologies, and the dimension of our cTnI microsensor was 1.0 cm x 0.8 cm. From measurements, microsensor sensitivity was 11.408 V (ng ml(-1))(-1) and sensing linearity was 0.961 in the 0-0.05 ng ml(-1) range. In the 0.05-1 ng ml(-1) range, sensitivity was 0.887 V (ng ml(-1))(-1) and linearity 0.933. The detection limit was 0.0063 ng ml(-1), and the response time was approximately 300 s. Bridge-type source read-out, temperature correction and temperature compensation circuits were also successfully designed and were used to reduce the influence of temperature on sensing signals.
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