4.4 Article

Growth mode modulation and crystalline quality improvement of highly relaxed n-Al0.6Ga0.4N on high-temperature-annealing AlN/sapphire template via SiH4-pretreatment

Related references

Note: Only part of the references are listed.
Article Physics, Applied

Reduction of dislocation density in lattice-relaxed Al0.68Ga0.32N film grown on periodical 1 μm spacing AlN pillar concave-convex patterns and its effect on the performance of UV-B laser diodes

Tomoya Omori et al.

Summary: We report the crystal growth of thick AlGaN films on periodical AlN pillar concave-convex patterns and its impact on UV-B laser diode performance. Voids formation in the AlGaN film, achieved by increasing the AlN pillar height and using high-quality AlN templates, effectively improves the quality of AlGaN with reduced dislocation density. The optimized AlGaN exhibits a threshold current density of approximately 12 kA cm(-2) and a high yield rate of over 90% in UV-B laser diode fabrication.

APPLIED PHYSICS EXPRESS (2022)

Article Physics, Applied

Impact of Si doping on dislocation behavior in MOVPE-grown AlN on high-temperature annealed AlN buffer layers

A. Mogilatenko et al.

Summary: The defect structure in unintentionally doped and Si-doped AlN layers was compared. The formation of irregular defects can be avoided by introducing Si-doping, which also produces an alternative mechanism for strain relaxation.

JOURNAL OF APPLIED PHYSICS (2022)

Article Physics, Applied

Centimeter-scale laser lift-off of an AlGaN UVB laser diode structure grown on nano-patterned AlN

Kanako Shojiki et al.

Summary: The centimeter-scale laser lift-off (LLO) of a UVB laser diode structure on nano-patterned AlN was demonstrated using a 257nm pulsed laser. The mechanism of this LLO, which can be used for fabricating vertical light-emitting devices, was analyzed in detail from the structural and optical properties. The intentional in-plane periodic and nanometer-scale inhomogeneous distribution of the AlN molar fraction in the AlGaN layer introduced by growing AlGaN on nano-patterned AlN enabled large-area high-yield LLO without cracks.

APPLIED PHYSICS EXPRESS (2022)

Article Physics, Applied

263 nm wavelength UV-C LED on face-to-face annealed sputter-deposited AlN with low screw- and mixed-type dislocation densities

Kenjiro Uesugi et al.

Summary: In this study, we optimized the sputter-deposition conditions for AlN and MOVPE growth conditions for AlGaN to reduce hillock density and size. After achieving surface-flattening of AlGaN, UV-C LEDs with a wavelength of 263 nm were fabricated on FFA Sp-AlN, and maximum external quantum efficiencies of approximately 4.9% and 8.0% were achieved without and with silicone encapsulation, respectively.

APPLIED PHYSICS EXPRESS (2022)

Article Physics, Applied

Pseudomorphic growth of thick Al0.6Ga0.4N epilayers on AlN substrates

Shashwat Rathkanthiwar et al.

Summary: The absence of strain relaxation mechanism in Al0.6Ga0.4N epilayers grown on AlN substrates is reported, despite the large lattice mismatch-induced strain energy, the epilayers exhibited a smooth and crack-free surface morphology.

APPLIED PHYSICS LETTERS (2022)

Article Physics, Applied

Local stress control to suppress dislocation generation for pseudomorphically grown AlGaN UV-C laser diodes

Maki Kushimoto et al.

Summary: Previously reported UV-C laser diode structures faced design constraints due to dark line defects at the edge of the mesa stripe. Detailed analysis revealed that these defects were caused by dislocations generated during mesa formation on highly strained epitaxial layers. By controlling the local concentration of shear stress, the emergence of dark-line defects was successfully suppressed. This technique is significant in improving the performance of optoelectronic devices.

APPLIED PHYSICS LETTERS (2022)

Article Chemistry, Multidisciplinary

Sec-Eliminating the SARS-CoV-2 by AlGaN Based High Power Deep Ultraviolet Light Source

Shangfeng Liu et al.

Summary: The study utilized high-quality AlN template and UVC LED technology to achieve efficient sterilization and complete elimination of the coronavirus within 1 second, demonstrating the potential of UVC-LED in disinfection.

ADVANCED FUNCTIONAL MATERIALS (2021)

Article Optics

Research on the measurement of CO2 concentration based on multi-band fusion model

Honglian Li et al.

Summary: This study presented a multi-band fusion model to enhance the performance of the super-continuum laser absorption spectrometer for measuring CO2 concentrations. The experimental results demonstrated the feasibility and accuracy of the fusion model in detecting CO2 levels, offering a new approach for gas detection.

APPLIED PHYSICS B-LASERS AND OPTICS (2021)

Article Chemistry, Multidisciplinary

Strain relaxation in InGaN/GaN epilayers by formation of V-pit detects studied by SEM, XRD and numerical simulations

Jana Stranska Matejova et al.

Summary: This study investigates V-pit defects in InGaN/GaN and finds that the formation of V-pits is a sufficient mechanism for strain relaxation, with no observed plastic relaxation caused by misfit dislocations in the epilayers.

JOURNAL OF APPLIED CRYSTALLOGRAPHY (2021)

Article Crystallography

Reduction of dislocation density in Al0.6Ga0.4N film grown on sapphire substrates using annealed sputtered AlN templates and its effect on UV-B laser diodes

Moe Shimokawa et al.

Summary: In the growth of Al0.6Ga0.4N, the formation of loop dislocations during three-dimensional growth reduces the dislocation density effectively. The study found that the spontaneous nucleation behavior of Al0.6Ga0.4N strongly depends on the fabrication temperature of homo-AlN, leading to successful reduction of dislocation density to as low as 5.8 x 10(8) cm(-2).

JOURNAL OF CRYSTAL GROWTH (2021)

Article Materials Science, Multidisciplinary

Effect of the Sputtering Deposition Conditions on the Crystallinity of High-Temperature Annealed AlN Films

Kenjiro Uesugi et al.

Summary: In this study, AlN films were deposited on sapphire substrates by sputtering deposition followed by high-temperature annealing. The research found that reducing the amount of Ar in the sputtering gas and decreasing the chamber pressure can significantly improve the crystallinity of the annealed AlN films.

COATINGS (2021)

Article Physics, Condensed Matter

High-Quality AlN Template Prepared by Face-to-Face Annealing of Sputtered AlN on Sapphire

Kanako Shojiki et al.

Summary: This study comprehensively investigated the properties of MOVPE-grown AlN films on FFA Sp-AlN templates, focusing on controlling surface morphology through thermal cleaning and growth conditions optimization. Results showed an atomically flat surface was achieved with low dislocation densities, but compressive strain in FFA Sp-AlN influenced the lattice constant and curvature of the AlN film grown by MOVPE.

PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS (2021)

Article Materials Science, Multidisciplinary

High Crystallinity and Highly Relaxed Al0.60Ga0.40N Films Using Growth Mode Control Fabricated on a Sputtered AlN Template with High-Temperature Annealing

Shohei Teramura et al.

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE (2020)

Article Physics, Applied

The 2020 UV emitter roadmap

Hiroshi Amano et al.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2020)

Article Multidisciplinary Sciences

The heterogeneous nucleation of threading dislocations on partial dislocations in III-nitride epilayers

J. Smalc-Koziorowska et al.

SCIENTIFIC REPORTS (2020)

Review Materials Science, Multidisciplinary

Review-Silicon Nitride and Silicon Nitride-Rich Thin Film Technologies: State-of-the-Art Processing Technologies, Properties, and Applications

Alain E. Kaloyeros et al.

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY (2020)

Article Crystallography

Stabilization of sputtered AlN/sapphire templates during high temperature annealing

S. Hagedorn et al.

JOURNAL OF CRYSTAL GROWTH (2019)

Article Chemistry, Physical

AlGaN-based ultraviolet light-emitting diode on high-temperature annealed sputtered AlN template

Ruxue Ni et al.

JOURNAL OF ALLOYS AND COMPOUNDS (2019)

Article Physics, Applied

AlGaN-based deep UV LEDs grown on sputtered and high temperature annealed AlN/sapphire

Norman Susilo et al.

APPLIED PHYSICS LETTERS (2018)

Review Optics

AlGaN photonics: recent advances in materials and ultraviolet devices

Dabing Li et al.

ADVANCES IN OPTICS AND PHOTONICS (2018)

Article Chemistry, Multidisciplinary

High-Quality AlN Film Grown on Sputtered AlN/Sapphire via Growth-Mode Modification

Chenguang He et al.

CRYSTAL GROWTH & DESIGN (2018)

Article Physics, Applied

Stacking fault domains as sources of a-type threading dislocations in III-nitride heterostructures

J. Smalc-Koziorowska et al.

APPLIED PHYSICS LETTERS (2016)

Article Crystallography

Preparation of high-quality AlN on sapphire by high-temperature face-to-face annealing

Hideto Miyake et al.

JOURNAL OF CRYSTAL GROWTH (2016)

Article Multidisciplinary Sciences

Mechanism of stress-driven composition evolution during hetero-epitaxy in a ternary AlGaN system

Chenguang He et al.

SCIENTIFIC REPORTS (2016)

Article Materials Science, Multidisciplinary

The dissociation of the [a plus c] dislocation in GaN

P. B. Hirsch et al.

PHILOSOPHICAL MAGAZINE (2013)

Article Physics, Applied

Internal Quantum Efficiency of Whole-Composition-Range AlGaN Multiquantum Wells

Kazuhito Ban et al.

APPLIED PHYSICS EXPRESS (2011)

Article Materials Science, Multidisciplinary

Kinetic approach to dislocation bending in low-mobility films

Srinivasan Raghavan

PHYSICAL REVIEW B (2011)

Article Physics, Applied

Strain relaxation in AlGaN multilayer structures by inclined dislocations

D. M. Follstaedt et al.

JOURNAL OF APPLIED PHYSICS (2009)

Article Crystallography

Growth of crack-free GaN on Si(111) with graded AlGaN buffer layers

A Able et al.

JOURNAL OF CRYSTAL GROWTH (2005)

Article Physics, Applied

Stress relaxation in mismatched layers due to threading dislocation inclination

AE Romanov et al.

APPLIED PHYSICS LETTERS (2003)

Article Physics, Applied

Phonon deformation potentials of α-GaN and -AlN:: An ab initio calculation

JM Wagner et al.

APPLIED PHYSICS LETTERS (2000)