4.6 Article

Effect of electronic transitions on near edge optical properties of off-stoichiometric boron carbide thin films

Journal

JOURNAL OF APPLIED PHYSICS
Volume 133, Issue 16, Pages -

Publisher

AIP Publishing
DOI: 10.1063/5.0145828

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In this study, the soft x-ray optical properties of off-stoichiometric boron carbide thin films were investigated using angle dependent x-ray reflectivity and x-ray photoelectron spectroscopy techniques. The optical constants in the boron K edge region were determined using energy dependent soft x-ray reflectivity, and the fine features corresponding to sigma* and pi* resonances were observed. The results show that the electronic transitions corresponding to sigma* resonance significantly increase the delta value, while the pi* transitions are related to the off-stoichiometric nature of the boron carbide.
In the present study, soft x-ray optical properties of off-stoichiometric boron carbide thin films are investigated, and the structure and chemical composition of the film is analyzed using angle dependent x-ray reflectivity and x-ray photoelectron spectroscopy techniques. Energy dependent soft x-ray reflectivity measured at a fixed grazing angle of 1.5(degrees) is used to determine the optical constants in the boron K edge region by applying the Kramers-Kronig technique. The measured optical constants show near edge fine features corresponding to sigma* and pi* resonances. The electronic transitions corresponding to sigma* resonance cause a 40%-75% increase in the delta value in the above boron K edge region. The pi* transitions corresponding to off-stoichiometric nature of the boron carbide are observed in the absorption spectra near similar to 192.7 eV. Details of the measured soft x-ray optical properties of the off-stoichiometric boron carbide thin film are discussed.

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