4.6 Article

Transparent Flat Panel X-Ray Source Using ITO Transmission Anode and ZnO Nanowire Cold Cathode

Journal

IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume -, Issue -, Pages -

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2023.3267757

Keywords

Anodes; Indium tin oxide; Cathodes; X-ray imaging; II-VI semiconductor materials; Zinc oxide; Imaging; Cold cathode; flat-panel X-ray source (FPXS); transparent anode; ZnO nanowire

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In this article, a fully vacuum-encapsulated transparent flat-panel X-ray source was prepared using ZnO nanowires cold cathode and indium-tin-oxide (ITO) transmission anode. The effect of ITO film thickness on X-ray radiation intensity was studied. The results showed a radiation dose rate of 6.85 mGy/s measured at 5 cm in front of the flat-panel X-ray source (FPXS) and an optical transmittance of 72.63% at 550-nm light. X-ray spectra indicated indium as the main element for X-ray generation. With the device used in an X-ray and visible light dual-functional inspection setup, simultaneous X-ray and visible light imaging of objects was demonstrated.
X-ray sources have important applications in medical diagnosis, industrial inspection, etc. Transparent X-ray source has not been reported before, which enables the applications such as simultaneous imaging using X-ray and visible light. In this article, a fully vacuum-encapsulated transparent flat-panel X-ray source was prepared by using ZnO nanowires cold cathode and indium-tin-oxide (ITO) transmission anode. The effect of thicknesses of ITO film on X-ray radiation intensity was studied. A radiation dose rate of 6.85 mGy/s measured at 5 cm in front of the flat-panel X-ray source (FPXS) under 48-kV anode voltage and an optical transmittance of 72.63% at 550-nm light were achieved. X-ray spectra show the indium is the main element to generate the X-ray. By adopting the device in an X-ray and visible light dual-functional inspection set-up, the X-ray and visible light imaging of objects were demonstrated simultaneously.

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