Controllable removal of silicon carbide at nano scale by ion-implantation assisted laser machining

Article Chemistry, Physical

Process exploration of β-Ga2O3 blind hole processing by water-assisted femtosecond laser technology

Kun Zhang et al.

Summary: This study investigated the influence factors of liquid-assisted femtosecond laser machining of blind holes in β-Ga2O3 surfaces. The results show that precise processing of β-Ga2O3 blind holes can be achieved by controlling femtosecond laser processing parameters, which is of great significance for the device applications of β-Ga2O3 substrates.

JOURNAL OF ALLOYS AND COMPOUNDS (2023)

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Article Materials Science, Ceramics

High-efficiency machining of silicon carbide Fresnel micro-structure based on improved laser scanning contour ablation method with continuously variable feedrate

Yongcheng Pan et al.

Summary: By using the improved laser scanning contour ablation (LSCA) method to machine SiC Fresnel microstructures, high-efficiency processing was achieved, showcasing the efficiency advantage of lasers in processing hard and brittle materials.

CERAMICS INTERNATIONAL (2021)

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Article Physics, Applied

Molecular dynamics simulations of ultrafast radiation induced melting at metal-semiconductor interfaces

Ashwin Ravichandran et al.

Summary: Metal-semiconductor contacts in silicon carbide diodes experience melting, recrystallization, and permanent amorphization at the interface when exposed to harsh radiation environments. Molecular simulations show tungsten near the radiation track undergoes melting, with most of it recrystallizing with noticeable undercooling, while SiC becomes permanently amorphous. Local undercooling in tungsten films can impact device performance before bulk melting temperature is reached, and high temperatures can cause interface fracture-like failure. These findings are crucial for understanding diverse failure modes in SiC diode materials.

JOURNAL OF APPLIED PHYSICS (2021)

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Article Engineering, Industrial

Ultrafast laser manufacturing: from physics to industrial applications

L. Orazi et al.

Summary: This paper discusses the importance and applications of ultrafast laser technology in the field of materials micro and nano-fabrication, revealing key phenomena of ultrafast laser-material interactions through the study of theoretical models and simulation techniques. Future trends include advancements in ultrafast system technology and the latest developments in ultrafast laser-based manufacturing processes.

CIRP ANNALS-MANUFACTURING TECHNOLOGY (2021)

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Article Engineering, Manufacturing