Journal
CHEMICAL ENGINEERING SCIENCE
Volume 267, Issue -, Pages -Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.ces.2022.118374
Keywords
CVD of CNTs; Temperature; Deposition uniformity; Pressure; Acetylene flow; Parametric analysis
Categories
Ask authors/readers for more resources
The computational investigation on the effect of process parameters (temperature, pressure, and acetylene flow) during the chemical vapor deposition of carbon nanotubes (CNTs) reveals their impact on the final product. The study establishes the mechanisms involved in CNT deposition and demonstrates the influence of temperature, pressure, and acetylene flow rate on catalyst deactivation and CNT growth. Additionally, the combined effect of temperature with pressure and acetylene flow rate is mechanistically investigated, and the deposition uniformity along the wafer area is explored.
The effect of process parameters (temperature, pressure and acetylene flow) during the chemical vapor deposition of carbon nanotubes (CNTs) on the final product are computationally investigated after having established a mechanism for the deposition of CNTs. The results are consistent with experimental mea-surements for the same process. It is found that temperature, pressure and acetylene flow rate affect the mechanisms that limit the catalyst deactivation and thus, the CNT growth. The combined effect of tem-perature with pressure and acetylene flow rate is investigated mechanistically, by identifying the mech-anisms responsible for the effect of process parameters, for the first time. The influence of these key -parameters on the deposition uniformity along the wafer area is also investigated. The study findings illustrate the importance of carefully adjusting the process parameters during the process engineering for the CVD of CNTs which can in turn result in a knowledge-based redesign or scale-up of the process.(c) 2022 Elsevier Ltd. All rights reserved.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available