Thermally robust optical properties of the wafer-scale a-Sb2O3 films

As a molecular crystal, the wafer-scale Sb2O3 films were deposited successfully by standard thermal evaporation deposition and their optical behaviours have been investigated in detail. XRD reveals that the as-deposited Sb2O3 films have a cubic phase (a-Sb2O3) with a lattice constant of about 11.16 & ANGS; . In a further step, the thermal stability of lattice vibrations and optical constants of the as-deposited a-Sb2O3 films have been investigated by Raman and ellipsometric spectra at various temperatures from 200 to 600 K. The temperature-dependent frequencies, intensities, and widths of the first-order Raman-active modes have a linear trend without phase transitions in the temperature range, which is confirmed by the temperature-dependence of optical constants (e, and e,) and optical band gap (Eg = 4.3-4.4 eV) extracted from the ellipsometric spectra. In addition, theoretical calculations were performed to clarify the physical mechanisms of dielectric constants and electronic transitions. The thermally robust crystalline structure and optical properties are very helpful for the a-Sb2O3 based (opto)electronic devices.

Automated summary

Large-area Sb2O3 films were successfully deposited by thermal evaporation deposition, and their optical behaviors were investigated in detail. The as-deposited films exhibited a cubic phase with a lattice constant of about 11.16 angstroms. The thermal stability of lattice vibrations and optical constants, as well as the electronic transitions, were studied at different temperatures. The thermally robust crystalline structure and optical properties of a-Sb2O3 films make them promising for (opto)electronic devices.