Quantitative phase-amplitude surface determination in reflection differential interference contrast profilometry

An approach for measuring the surface profile of the samples with reflection variations using the Nomarski differential interference method is presented. The system is analyzed with Jones's matrices tool, and polariza-tion effects of a non-polarizing beam splitter are taken into account. Equations are also developed to allow the determination of the surface profile from interference intensity when the sample reflectively is not uniform. The validity and accuracy of the measurement are verified by measuring the adhered silicon cantilever on a substrate with high reflectivity. This method is expected to be a valuable tool to inspect elements of micromechanics and microsystems. & COPY; 2023 Optica Publishing Group

Automated summary

An approach for measuring the surface profile of samples with reflection variations using the Nomarski differential interference method is presented. The system is analyzed using Jones's matrices tool and considers the polarization effects of a non-polarizing beam splitter. Equations are developed to determine the surface profile from interference intensity in the presence of non-uniform reflection. The validity and accuracy of the measurement are verified by measuring a silicon cantilever on a high-reflectivity substrate. This method is expected to be valuable for inspecting elements of micromechanics and microsystems.